Balzers Aktiengesellschaft

Jurgen Ramm

Erich Bergmann

Helmut Daxinger

Eugen Beck

Albert Zueger

Rainer Buhl

Hans Schulz

Hugo Frei

Gunter Peter

A cathode chamber (1) with a thermionic cathode (3) generates a low-voltage arc discharge in a vacuum treatment chamber (11). Arcing on wall portions of the treatment chamber (11) is prevented by providing a screen (20), operated so as to be electrically floating, in the region of a diaphragm (9), through which diaphragm (9) the discharge is drawn from the cathode chamber (1) into the treatment chamber (11). The discharge is ignited by impressing portions of the cathode chamber wall with the ignition potential, with respect to the potential of the cathode (3).

Process and apparatus for generating and igniting a low-voltage

In order to remove material from the surfaces in a vacuum chamber it is proposed to activate hydrogen gas in a plasma with the aid of a low voltage arc discharge which is supported by a hot emitting electrode in a cathode chamber. The removing method allows the cleaning of surfaces onto which subsequently safely adhering layers of a highest purity can be precipitated. The method can also be used for cleaning vacuum chambers. The small expenditures regarding apparatuses with the high rates of removal to be obtained produce a highly economical practicing of the method.

Method of removing material from a surface in a vacuum chamber

A coated tool or instrument has a wear-resistant hard coating (7) which is preferably titanium nitride for working organic material which is disposed on a separating layer (9) applied on a basic body (3). The separating layer (9) comprises a ceramic electrically non-conducting material. Such a material is preferably an oxide, nitride or oxynitride of silicon. The separating layer (9) protects the basic body (3) of the tool or instrument of e.g. a non-corrosion resistant steel. During the coating of the basic body (3) with the ceramic material, a pulsating dc voltage is applied to the basic body (3) or its holders. The pulse height is changed during the vapor deposition from high negative values to low negative values.

Tool or instrument with a wear-resistant hard coating for working or

For coating workpieces having basic bodies (3), with a ceramic, electrically non-conducting material, during the coating process a pulsating dc voltage is applied to the basic bodies (3) or their holders (36). Preferably the pulse height is changed during vaporization used for the coating process, from high negative values to smaller negative values. A further layer can be applied onto the workpieces coated in this way whereby these work-pieces, due to their excellent corrosion resistance, are suited as pieces of jewelry which can be exposed in particular to ocean water and body perspiration, as rolling bodies in which the use of oil or grease as corrosion protection can be dispensed with, and as separating and cutting tools for organic materials.

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Flaesch, Switzerland

Jurgen Ramm