Trumpf Werkzeugmaschinen Gmbh + Co. Kg

Trumpf Gmbh & Company

Trumpf Lasersystems for Semiconductor Manufacturing Gmbh

Jürgen-Michael Weick

Ross Jones

Peter Georg Laitenberger

Martin Lambert

Gerhard Hammann

Dieter Burger

Armin Horn

Dominik Vees

Jens Braun

Thomas Rupp

Nick Collier

Thomas Mohler

Tobias KLÜHSPIES

The invention relates to an optical element for guiding and forming a laser beam, and to a method for recording beam parameters, particularly in a laser system, comprising a carrier substrate () and a coating (), which is applied to at least one side of the carrier substrate (), and comprising at least one temperature sensor (). The temperature sensor () is comprised of a number of pixels arranged in a matrix, and each respective pixel has at least one temperature-sensitive element (). The at least one temperature-sensitive element () of the pixel is constructed inside the carrier substrate () made of silicon.

Optical guide with temperature sensing matrix

A material processing machine configured to process a workpiece with a processing head movable with respect to the workpiece, including a workpiece support, a processing head carrier movable with respect to the workpiece support, the carrier including a first half of a releasable head coupling, and a processing head carried by the head carrier and positioned to operably engage a workpiece supported by the support to process the workpiece, the processing head including a second half of the releasable head coupling. The releasable head coupling defines an adjustable head release force.

Interface for a laser processing head

A laser processing machine has a laser beam generator (2), a processing head (4) movable relative thereto, and a gas chamber (10) connected to a gas compensating chamber (15). The gas chamber (10) provides at least part of the beam guidance chamber (6) for the laser beam (5), and at least partially is bordered by a expansible and compressible gas chamber wall (11, 12) which expands and compresses with the motion of the processing head (4) relative to the laser beam generator (2). The guidance gas chamber (10) is essentially closed apart from the flow connection to the gas compensating chamber (15), and the gas compensating chamber (15) changed in size response to the expansion and compression of the gas chamber wall (11, 12).

Laser machine with gas volume compensation

A laser machine tool includes a laser beam generator (3) and a machining head (5), and the laser beam (2) passes between the laser beam generator (3) and the machining head (5) in a beam passage (25) that is at least partially closed. The beam passage (4) is filled with air with a limited CO.sub.2 content. In this way, the laser beam (2) in the beam passage is protected at low cost from the influence of gases that reduce its power, especially when the path of the beam is very long.

Laser machine tool with gas filled beam delivery conduit

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Asperg, Germany

Jürgen-Michael Weick