Ev Group E. Thallner Gmbh

Jurgen Mallinger

Thomas Wagenleitner

Jurgen Markus Suss

Dominik Zinner

Thomas Plach

Christian Sinn

Jurgen Michael Suss

A method for bonding a first substrate to a second substrate on mutually facing contact surfaces of the substrates includes a device in which the first substrate is mounted on a first chuck and the second substrate is mounted on a second chuck. A plate is arranged between the second substrate and the second chuck. The second substrate with the plate is deformed with respect to the second chuck before and/or during the bonding.

Apparatus and method for bonding substrates

A method for aligning and contacting a first substrate with a second substrate using a plurality of detection units and a corresponding device for alignment and contact.

Method and device for alignment of substrates

A method for bonding a first substrate to a second substrate on mutually facing contact surfaces of the substrates, wherein the first substrate is mounted on a first chuck and the second substrate is mounted on a second chuck, and wherein a plate is arranged between the second substrate and the second chuck, wherein the second substrate with the plate is deformed with respect to the second chuck before and/or during the bonding. Furthermore, the present invention relates to a corresponding device and a corresponding plate.

Method for bonding substrates

A substrate holder having a fixing surface for holding a substrate, a system having such a substrate holder, a use of such a substrate holder, a method for bonding two substrates and a product, particularly a substrate stack, produced using such a method and also a use of such a substrate holder for such a method.

Substrate holder and method for bonding two substrates

A method and a device for bonding a first substrate with a second substrate at mutually facing contact faces of the substrates.

Method and substrate holder for the controlled bonding of substrates

A method for aligning and contacting a first substrate with a second substrate using a plurality of detection units, and a corresponding device for alignment and contact.

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Senftenbach, Austria

Jurgen Mallinger