Kabushiki Kaisha Toshiba

Junzou Utida

Masakazu Hayashi

Fumihiko Ishida

A microscope apparatus includes a microscope body having a mounting section. An observation unit is removably fitted to the mounting section, and includes an objective lens unit and a tip unit. The lens unit has an objective lens opposed to an observation surface and forms an optical image of the surface viewable through the microscope body. The tip unit includes a support member attached to the mounting section, and a glass plate supported by the support member to be located between the objective lens and the observation surface. A fine conductive tip is fixed to the glass plate and extends therefrom toward the observation surface, in the direction of an optical axis of the objective lens. A piezoelectric section for shifting the glass plate is fixed to the support member.

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Fuji, Japan

Junzou Utida