Canon Kabushiki Kaisha

Junzaburou Ono

Yutaka Maruyama

Yasuhiro Ogawa

Yosuke Igarashi

Yasuhiro Tsubota

Masahiro Harada

A vibrating body includes a substrate, a piezoelectric element comprising a piezoelectric layer and electrode layers and joined to the substrate, and a ceramic layer between the substrate and the piezoelectric element. The ceramic layer comprises a first region and a second region which is adjacent to the first region in a direction perpendicular to a thickness direction of the ceramic layer. The first region has a square shape, each side of the first region having a length equal to a thickness of the ceramic layer, the second region has a square shape, each side of the second region having the length equal to the thickness of the ceramic layer, and a difference between a porosity of the first region and a porosity of the second region is not greater than 15%.

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Tokyo, Japan

Junzaburou Ono