Kasuga Denki, Inc.

Junya Yoshida

Takao Morishita

Satoru Ogiso

Satoshi Sugimura

Yukihira Sakurai

Tatsuya Inamura

A discharge electrode E in an electrode chamber C comprises a plurality of electrode members. The electrode membersare disposed facing each other by having a supporting membertherebetween, a gap is formed between the facing portions of the electrode members, and by having the gap as a gas passageway, the gas passageway is opened in the leading end of the discharge electrode. A replacement gas having been supplied from a manifold pipeis supplied to the gas passagewayvia an orifice.

Surface modifying device

Surface modification device forms a discharge area Ebetween a discharge electrodeand a counter electrode, supplies substitution gas to the discharge area E, and modifies the surface of the base material to be processed. The surface modification device comprises; a slit-shaped substitution gas passage; and cover membersthat form curtain passagesin spaces facing the discharge electrode. While the substitution gas is being supplied to the discharge area E, gas injected from the curtain passagesprevent the inflow of an entrained flow a and the outflows b, bof the substitution gas, thereby maintaining the concentration of substitution gas inside the discharge area E

Surface modification device

A discharge electrode E in an electrode chamber C is formed of a pair of electrode membersandhaving lengths equal to or greater than a width of a film F. Also, the pair of electrode membersandare disposed facing each other so as to sandwich a support memberthere-between, which has nearly the same length as to electrode members; a gap is formed in a section in which the pair of electrode membersandface each other; and this gap is open at a tip of the discharge electrode so as to serve as a gas pathway. Meanwhile, in the aforementioned support member, a plurality of gas guiding holesare formed in a longitudinal direction thereof, and the gas guiding holes are in communication with a gas supplying system.

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Kawasaki, Japan

Junya Yoshida