Shin-Etsu Polymer Co., Ltd.

Junya Toda

Hiroshi Mimura

Takayuki Nakayama

Atsushi Sumi

Takashi Suda

Akihiro Hasegawa

Kazumasa Onuki

Naoto Watanabe

Atsusi Sumi

According to one embodiment, a substrate storage container includes a transport component configured to be mountable to a container body by being relatively displaced with respect to the container body from the rear side to the front side. The container body has a container body-side protrusion protruding upward. The transport component has a transport component-side protrusion protruding downward. In a mounted state, the transport component-side protrusion is engaged with the front side of the container body-side protrusion to be restricted from being displaced backwards. When a predetermined load is applied to the transport component-side protrusion upwardly, the transport component-side protrusion is displaced by a smaller amount than the container body-side protrusion displaced when the predetermined load is applied to the container body-side protrusion downwardly.

Substrate storage container

A substrate storage container includes a container main body having an opening at the front, a support portion for supporting a substrate in the interior thereof, and a substrate receiving portion positioned more toward a rear wall than the support portion, an a lid on which a substrate pressing portion for pressing the substrate is formed. The substrate receiving portion and the substrate pressing portion are present within a range of greater than or equal to 0 mm and less than or equal to 80 mm in the horizontal direction from a vertical center line that passes through the center of the container main body when the lid is viewed from the front.

There is provided a substrate storage containercapable of suppressing deformation of a functional member insert-molded and a method of manufacturing the container, and an device positioning memberas the functional member including: an attachment parthaving a thick sectionformed in thickness equal to a wall member of a container bodyor a lidand a thin sectiondecreasing in thickness as it approaches toward an outer edge from the thick section; and a body partcoupled to the attachment part, the device positioning memberbeing disposed on the container bodyor the lidso that a first surfaceof the thick sectionis flush with an inner surface of the wall member.

Substrate storage container and method of manufacturing the same

A substrate storage container with increased mounting force of the conveyance component is provided. The substrate storage container comprises a container body having an opening closed by a lid and capable of storing a plurality of substrates, and a conveyance component detachably attached to the container body via a mounting mechanism, wherein the mounting mechanism includes at least one first mounting portion on the opening side of the container body and at least one second mounting portion on the side away from the opening. Furthermore, the conveyance component has at least one engaging portion to be engaged with the mounting mechanism, and the at least one engaging portion includes at least one first engaging portions displaced and engaged in a predetermined direction and at least one second engaging portion displaced and engaged in a direction different from the predetermined direction.

A door structure that is detachably fitted into an opening portion of a container body for storing substrates includes a casing to be fitted to the opening portion of the container body, a locking mechanism provided in the casing for locking the casing by causing an engaging piece to project out from the peripheral wall of the casing in a retractable manner based on rotation of a rotator so as to interfere with the inner periphery of the opening portion of the container body, a cover for enclosing the locking mechanism, and an operational window formed in the cover so as to oppose the rotator.

Door structure and substrate storage container

A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between the fixed sleeve and the holding sleeve, leaving a clearance, an elastically deformable element for opening and closing the check valve, an interior lid sleeve for gas flow, opposing the check valve and supporting the elastically deformable element, and a filter interposed between the holding sleeve and the interior lid sleeve.

Growing community of inventors

Saitama, Japan

Junya Toda