Canon Anelva Corporation

Junya Soeda

Hidetoshi Shimokawa

Naoya Fukuda

Jun Miura

Satoshi Nomura

Shuji Kumagai

Tetsuro Toda

Satoshi Negishi

A load lock device includes a load lock chamber including a first conveyance port connected to a transfer chamber connected to a reduced-pressure processing device, and a second conveyance port connected to a loader chamber; a substrate holder configured to hold a substrate in the load lock chamber; a driving mechanism arranged below the load lock chamber to move the substrate holder up and down and connected to the substrate holder via a connecting member; an extension chamber extended from a lower portion of the load lock chamber to a side; and a pump arranged below the extension chamber and configured to discharge a gas in the load lock chamber via the extension chamber. The extension chamber includes a bottom surface with an opening at a position deviated from a vertically lower position of the substrate holder, and the pump is connected to the opening.

Load lock device

Growing community of inventors

Yokohama, Japan

Junya Soeda