Tokyo Electron Limited

Tokyo Electron Limi Ted

Junya Sato

Kiichi Takahashi

Toshiyuki Kobayashi

Yo Abe

Yoshinobu Motodate

Masahiro Numakura

Yoshikazu Ishikawa

Motoi Okada

Takuro Tsutsui

Nao Akashi

Atsushi Suzuki

Kei Sano

Shouichi Otake

Ryu Kitahara

Toshihiko Hamada

Hiroyuki Sato

Shun Suto

Takayuki Kita

Kiwamu Tsukino

Toshimitsu Chiba

Kazuya Koshiishi

Yuta Haga

According to an aspect of the present disclosure, a substrate state determining apparatus includes: an image capturing unit that captures an image of a substrate placed on a stage; a learning unit that executes a machine learning using training data in which information indicating a state of the substrate is attached to the image of the substrate, so as to generate a substrate state determination model in which the image of the substrate is taken as an input and a value related to the state of the substrate corresponding to the image of the substrate is taken as an output; and a determination unit that determines the state of the substrate corresponding to the image of the substrate captured by the image capturing unit, using the substrate state determination model generated by the learning unit.

Substrate state determining apparatus, substrate processing apparatus, model generating apparatus, and substrate state determining method

A teaching method according to an embodiment is for a transfer device including a substrate holding unit including a suction port for holding a substrate by applying suction, an actuation mechanism for moving the substrate holding unit, and a pressure detecting unit for detecting a pressure in a suction path communicating with the suction port. The method includes: moving the substrate holding unit under the substrate; moving the substrate holding unit upward toward the substrate, while applying suction to the suction path and detecting the pressure in the suction path; determining whether or not the substrate holding unit has touched the substrate, based on the pressure in the suction path; and storing, as a standard position, a position of the substrate holding unit at a time of determining that the substrate holding unit has touched the substrate.

Teaching method of transfer device

A substrate processing apparatus includes at least one process module configured to process first substrates. A position detector is configured to detect first positions of the first substrates. A control unit is configured to control the position detector so as to measure a second position of a second substrate selected from the first substrates to be processed in a same process module depending on a measurement interval set for the same process module.

Substrate processing apparatus, substrate processing method and recording medium recording substrate processing program

When a substrate is transferred by a holding arm to a multiple tier wafer boat, contact between the holding arm and the substrate is prevented. When the wafer boat is not subjected to a thermal effect, a normal height position of a ring member is obtained by relatively elevating and lowering a transfer base member with respect to the wafer boat. Before a wafer, which is not yet thermally processed, is transferred to the wafer boat, a height position of the corresponding ring member is obtained. By comparing a difference between the normal height position of the ring member and the height position of the ring member before the wafer is transported, with a threshold value, whether to transfer the wafer by the wafer transfer mechanism to the wafer boat can be judged.

Thermal processing apparatus, thermal processing method, and storage medium

A binarizing method for binarizing an original image of an electrode pad on a substrate. The method includes the steps of processing an electrode image to generate a binary image of the electrode by binarzing the original image with a first threshold value, calculating a contact trace area to calculate the contact trace area including a portion that is predicted to be a trace of an object that contacted the electrode from the binary image of the electrode, processing a contact trace image to generate the contact trace area binary image by binarizing the original image of the area extracted by the contact trace area extracting unit with a second threshold value different from the first threshold value, and synthesizing the images to synthesize the binary image of the electrode and the contact trace area binary image by taking a logical sum on a corresponding pixel to pixel basis.

Image binarizing method, image processing device, and computer program

Growing community of inventors

Miyagi, Japan

Junya Sato