Mitsubishi Electric Corporation

Mitsubishi Denki Kabushiki Kaisha

Hitachi High-tech Corporation

Hitachi-high-technologies Corporation

Junya Sasaki

Katsuyuki Sumimoto

Masahiro Nakajima

Keisuke Katsurada

Norifumi Uno

Kyoko Higashino

Masahiro Sumiya

Hideyuki Imanaka

Keiichi Komurasaki

Noriyuki Wada

Takashi Uemura

Yasushi Sonoda

Akio Kamimurai

Yoshito Kamaji

Luke Joseph Himbele

Tomoyoshi Ichimaru

Takahiro Yonemoto

The present invention provides a plasma processing method for subjecting a sample on which a metal element-containing film is disposed to plasma etching in a processing chamber. The method comprises: subjecting an inside of the processing chamber to plasma cleaning using a boron element-containing gas; removing the boron element using plasma after the plasma cleaning; subjecting the inside of the processing chamber to plasma cleaning using a fluorine element-containing gas after removing the boron element; depositing a deposited film in the processing chamber by plasma using a silicon element-containing gas after the plasma cleaning using the fluorine element-containing gas; and subjecting the sample to plasma etching after depositing the deposited film.

Plasma processing method

There is provided a vehicle-power-generator control apparatus that can largely raise the gasoline mileage of an internal combustion engine. The vehicle-power-generator control apparatus includes a boost control unit having a function of making a magnetic-field current control unit perform boost-on control or boost-off control, based on a command provided by an ECU through communication and a function of making the magnetic-field current control unit perform boost-on control or boost-off control, based on at least one of a rotation speed of an internal combustion engine and a temperature of a vehicle power generator.

Vehicle-power-generator control apparatus

The generator control device for vehicle is provided with a boost permission determination circuit capable of controlling the power generation rate, if there is communication between the engine control device and the generator control device for vehicle, the boost permission determination circuit performs the field current control so that the specified power generation rate is achieved by the communication, if there is no communication between the engine control device and the generator control device for vehicle, based on the rotation speed and temperature of the generator for vehicle, the boost permission determination circuit performs the field current control.

Generator control system for vehicle

The present invention is a plasma processing apparatus that includes a processing chamber where plasma processing is performed on a sample, a radio frequency power supply that supplies radio frequency power to generate plasma, a sample stage on which the sample is placed, and a gas supply unit that supplies a gas to the processing chamber. The gas supply unit includes a first pipe that supplies a first gas as a gas for etching process to the processing chamber, a second pipe that supplies a second gas as a gas for etching process to the processing chamber, and a third pipe through which a third gas as a gas for deposition process flows. The third pipe is coupled to the second pipe. A fourth valve is arranged on the second pipe. The fourth valve prevents the third gas from flowing in a direction toward a supply source of the second gas.

Plasma processing apparatus

Power generation control devices () of respective power generators () transmit conduction rates of field coils () of the respective power generators () to an external control device (), while the external control device () obtains an average value of the conduction rates, obtains a field duty limiting command value for limiting the conduction rate of the field coil () determined by the power generation control device () based on the average value, and transmits the field duty limiting command value to the power generation control device (). With this operation, the power generation control device () limits power generation amounts of the respective power generators () based on the command value, to thereby equalize the power generation amounts of the respective power generators ().

Power generation control system, power generation control device, and external control device

To provide a generator controller can determine permission of power generation autonomously within a range where startability is not deteriorated, even in the case where the generator controller cannot communicate with the engine controller. A generator controller, in case of communication normal time with engine controller, permits the generation voltage control when the permission command signal is received from the engine controller and the generator rotational speed is higher than a determination value at communication normal time, and prohibits the generation voltage control at other times; in the case of communication failure time, permits the generation voltage control when the generator rotational speed is higher than a determination value at communication failure time, and prohibits the generation voltage control at other times.

Generator controller

There is provided a vehicle-power-generator control apparatus and the control method thereof that does not notify a passenger of any erroneous alarm indicating an abnormality in an electric power generator, even when a power-generation stop command is received. it is determined that a vehicle power generator is not rotating, when the rotation speed, of the vehicle power generator, that is detected based on a power-generation voltage generated across an armature winding of the vehicle power generator is the same as or lower than a predetermined value; there is generated a power-generation stop holding signal obtained by delaying by a predetermined time a time point at which a power-generation stop signal, generated when the decoded command signal is a power-generation stop command signal for stopping electric-power generation, stops; then, the non-rotation determination signal is masked and invalidated, based on the power-generation stop holding signal.

Vehicle-power-generator control apparatus and control method thereof

A plasma processing method includes forming a deposition film containing silicon as a component in a processing chamber by generating a first plasma in the processing chamber; plasma etching of a sample in which a film containing a metal is formed in the processing chamber; and removing of a metal-based reaction product by generating a second plasma including an element having reducibility and halogen. The plasma processing method further includes removing the deposition film by a third plasma generated by using gas containing a fluorine element; and removing residual gas by a fourth plasma.

A master generator is configured to use a duty upper limit value and a duty lower limit value to perform duty restriction processing on a PWM signal in continuous Y cycles out of generated X cycles, and transmit the PWM signal after the restriction processing to a slave generator. The slave generator is configured to receive the PWM signal after the restriction processing transmitted from the master generator as a received PWM signal, and determine that a reception abnormality exists when the received PWM signal is received as a signal representing a duty less than the duty lower limit value or a duty more than the duty upper limit value in continuous (X&#x2212;Y+1) cycles.

Power generator system, power generator control device, and power-generation balance control method for power generator system

A one-time memory control apparatus is obtained that prevents erroneous opening of a fuse from causing logic conversion and enhances the reliability. The one-time memory control apparatus includes an opening current creation fuse C opening switch and an opening current creation fuse D opening switch that each allow a fuse opening current from a fuse opening current creation circuit to flow in response to an opening enable signal, and a fuse opening permission signal creation circuit that receives respective logic signals corresponding to the states of fuse opening currents that flow through an opening current creation fuse C and an opening current creation fuse D, and that creates a fuse opening permission signal.

One-time memory control apparatus

A vehicle AC generator control apparatus, the rotor of an vehicle AC generatorof which is coupled through a torque transfer member with the output axle of an internal combustion engine mounted in a vehicle, is provided with a magnetic-field current control system that can control the value c of a magnetic-field current flowing in a magnetic-field windingof the vehicle AC generatorso that the magnetic-field current value c coincides with a magnetic-field current command value b; it is made possible to make the rotation torque of the vehicle AC generatordepend only on the rotation speed and to stabilize control of the internal combustion engine.

Vehicle AC generator control apparatus

A current detector of an inductive load includes: an inductive load; a switching elementconnected in series with the inductive load and controls an electric current to be carried through this inductive load by ON/OFF operation; a current circulating diodeconnected in parallel with the inductive load and circulates an electric current of the inductive load when the switching element is OFF; current detecting devicemaking a sampling in a cycle of a predetermined sampling period to detect an electric current to be carried through the switching element; and current correction devicemaking a correction with respect to an electric current value having been detected at the current detector, and in which the current correction devicechanges the correction rate based on DUTY of a pulse with which the switching element is brought in ON/OFF operation.

Current detector of inductive load

In a control device for a vehicle AC generator, a voltage control includes target voltage adjusting means for adjusting a target voltage value in response to a target change command from an external control unit and a gradual excitation control circuit that controls an excitation duty to increase according to an excitation duty control characteristic when a vehicle load increases and when the target voltage adjusting means varies the target voltage value to a lower value. The gradual excitation control circuit includes duty characteristic varying means for varying the excitation duty control characteristic. The duty characteristic varying means varies a rate of increase of the excitation duty in a predetermined region of the excitation duty control characteristic in comparison with its other region.

Control device for vehicle AC generator

A vehicle alternator control device in which, when a signal detection portion detects a determined input signal, an operating mode of an overvoltage warning portion is switched to a detection operating mode by an overvoltage warning operating mode switching portion. In the detection operating mode, the overvoltage warning portion is activated when a voltage below a determined voltage has continued for a time that is less than a determined time. Accordingly, checks related to the operation of the overvoltage warning portion can be completed in a short time at a plant or the like.

Alternator control device for vehicle

A controller of a generator for a vehicle in the invention includes a battery voltage detecting circuit and an output terminal voltage detecting circuit of an AC generator. A value of a detected voltage of the output terminal voltage of the AC generator is set to be higher than a value of a detected voltage of the battery voltage. A diagnosis alarm signal is outputted when the detected voltage of the battery voltage is lower than the set value while the detected voltage of the output terminal is higher than the set value.

Growing community of inventors

Tokyo, Japan

Junya Sasaki