Horiba Stec, Co., Ltd.

Matsushita Electronics Corporation

Junya Nakai

Sotaro Kishida

Tetsuya Shimizu

Masaki Kawasaki

Takehisa Hataita

Yoji Yamamoto

Akira Kuwahara

Hirotaka Yabushita

Masanobu Nakazono

Hideo Koshino

Tomoko Katsuda

In a vacuum gauge that controls a temperature of a sensor section to a high temperature, a circuit board can be sufficiently cooled without applying air to the vacuum gauge from outside. The vacuum gauge includes a sensor section that communicates with a measurement space via a connection port and outputs an output signal according to a pressure in the measurement space, a heater provided around the sensor section to heat the sensor section, a circuit board arranged on a side opposite to the connection port with respect to the sensor section, a first inner case that accommodates the sensor section and the heater, a second inner case that accommodates the circuit board, and an outer case that surrounds the first inner case and the second inner case and forms a flow path, through which outside air flows, together with the first inner case and the second inner case.

Vacuum gauge

The pressure sensor comprises the diaphragm, an electrode body, a housing, an inlet pipe, and a thermal buffer member. The diaphragm includes a pressure receiving surface configured to receive a pressure of a measured target fluid. The electrode body includes an electrode surface facing a rear surface of the pressure receiving surface with a gap interposed therebetween. The housing supports the diaphragm so as to form a measuring chamber by surrounding the pressure receiving surface. The inlet pipe is coupled to the housing and configured to guide the measured target fluid into the measuring chamber. The thermal buffer member is disposed on the inlet pipe and has a predetermined heat capacity. Accordingly, the diaphragm is unlikely to bend due to a rapid temperature change in a fluid guiding pipe disposed a fluid line.

Pressure sensor with reduced deviation of temperature distribution

In order to attain a main objective of the present invention to provide an ion source capable of efficiently extracting ions, the ion source is configured to include: a conductive tubular body having an ion emitting aperture in a tip surface thereof and a penetration portion in a side wall thereof allowing thermo-electrons to pass through from an outside toward an inside; a mesh surrounding an outer periphery of the penetration portion; and a thermionic emission filament surrounding an outer periphery of the mesh, such that the thermo-electrons emitted from the thermionic emission filament pass through the mesh and reach the inside of the conductive tubular body through the penetration portion.

Ion source, quadrupole mass spectrometer and residual gas analyzing method

In an indirectly heated cathode comprising a heater having an alumina electrical insulating layer formed by layering and sintering alumina particles on a surface of a metal wire and an electron-emitting part that receives heat from the heater and emits thermoelectrons, and a cathode-ray tube comprising the indirectly heated cathode, the alumina particles contained in the alumina electrical insulating layer have a purity of at least 99.7 wt % and the alumina particles used for forming the alumina electrical insulating layer have a Na content of 20 ppm or less or a Si content of 100 ppm or less, thus enabling stable production, avoiding the occurrence of cracks in the alumina electrical insulating layer and heater deformation even in the practical operation of the cathode-ray tube, and lengthening the life of the heater.

Indirectly heated cathode for a CRT having high purity alumina insulating layer with limited amounts of Na OR Si

Growing community of inventors

Kyoto, Japan

Junya Nakai