Adeka Corporation

Junya Miyake

Kentaro Kimura

Naomi Sato

Yoshitomo Takeuchi

Taiki Mihara

A thermal acid generator having a high acid generation temperature, and a resist composition using the same. The thermal acid generator is a sulfonic acid derivative compound represented by the following Formula (I): (wherein, Rrepresents an aliphatic hydrocarbon group having 1 to 18 carbon atoms or the like, or a group represented by the following Formula (II): (wherein, Yrepresents a single bond or an alkanediyl group having 1 to 4 carbon atoms; Rand Reach independently represent an alkanediyl group having 2 to 6 carbon atoms, or the like; Rrepresents a linear or branched alkyl group having 1 to 18 carbon atoms, or the like; a and b each represent 0 or 1; and either a or b is 1); Rto Reach independently represent a linear or branched alkyl group having 1 to 14 carbon atoms; the aliphatic hydrocarbon group or the like of Rhas no substituent or is substituted with a halogen atom or the like; and a methylene structure in the aliphatic hydrocarbon group or the like of Ris optionally substituted with &#x2014;O&#x2014; or the like).

Thermal acid generator and resist composition using same

Provided are: a thermal acid generator having a high acid generation temperature; and a resist composition using the same. The thermal acid generator is a sulfonic acid derivative compound represented by the following Formula (I): (wherein, Rrepresents an aliphatic hydrocarbon group having 1 to 18 carbon atoms or the like, or a group represented by the following Formula (II): (wherein, Yrepresents a single bond or an alkanediyl group having 1 to 4 carbon atoms; Rand Reach independently represent an alkanediyl group having 2 to 6 carbon atoms, or the like; Rrepresents a linear or branched alkyl group having 1 to 18 carbon atoms, or the like; a and b each represent 0 or 1; and either a or b is 1); Rto Reach independently represent a linear or branched alkyl group having 1 to 14 carbon atoms; the aliphatic hydrocarbon group or the like of Rhas no substituent or is substituted with a halogen atom or the like; and a methylene structure in the aliphatic hydrocarbon group or the like of Ris optionally substituted with &#x2014;O&#x2014; or the like). 

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Tokyo, Japan

Junya Miyake