Fujimi Incorporated

Tokyo Electron Limited

Junya Kitamura

Hiroaki Mizuno

Hiroyuki Ibe

Yoshiyuki Kobayashi

Kazuyuki Tsuzuki

Kazuto Sato

Tsuyoshi Itsukaichi

Isao Aoki

Nobuyuki Nagayama

Yoshikazu Sugiyama

A thermal spray slurry of the present invention contains ceramic particles having an average particle size of 200 nm or more and 5 &#x3bc;m or less. Precipitates formed when 700 mL of the thermal spray slurry is placed in a 16.5-cm-high cylindrical vessel having a volume of 1 L and is allowed to stand still at room temperature for 1 week are made to disappear by disposing, at a temperature of 20&#xb0; C. or higher and 30&#xb0; C. or lower, the cylindrical vessel so as for the central axis of the cylindrical vessel to be horizontal and by rotating the cylindrical vessel at a rotation speed of 100 rpm for 120 minutes around the central axis of the cylindrical vessel to stir the thermal spray slurry in the cylindrical vessel.

Slurry for thermal spraying, thermal sprayed coating, and method for forming thermal sprayed coating

A thermal spray slurry of the present invention contains ceramic particles in a content of 10% by mass or more and 85% by mass or less, and has a viscosity of 3,000 mPa&#xb7;s or less. The ceramic particles have an average particle size of, for example, 1 nm or more and 5 &#x3bc;m or less. The thermal spray slurry may further contain a dispersant. The thermal spray slurry may further contain a viscosity modifier. The thermal spray slurry may further contain a flocculant.

Slurry for thermal spraying, thermal spray coating, and method for forming thermal spray coating

A thermal spray powder of the present invention contains ceramic particles having an average particle size of 1 &#x3bc;m or more and 20 &#x3bc;m or less. The ceramic particles have a flowability index value FT of 3 or more measured by using a powder rheometer. The flowability index value FF is determined by measuring the maximum principal stress and the uniaxial collapse stress of the ceramic particles at normal temperature and normal humidity when 9 kPa of shear force is applied to the ceramic particles, and by dividing the measured maximum principal stress by the measured uniaxial collapse stress.

Powder for thermal spraying, thermal sprayed coating, and method for forming thermal sprayed coating

A thermal spray powder of the present invention contains a rare earth element and a group 2 element, which belongs to group 2 of the periodic table. The thermal spray powder, which contains a rare earth element and a group 2 element, is formed, for example, from a mixture of a rare earth element compound and a group 2 element compound or from a compound or solid solution containing a rare earth element and a group 2 element. The thermal spray powder may further contain a diluent element that is not a rare earth element or a group 2 element and is not oxygen, which is at least one element selected, for example, from titanium, zirconium, hafnium, vanadium, niobium, tantalum, zinc, boron, aluminum, gallium, silicon, molybdenum, tungsten, manganese, germanium, and phosphorus.

Thermal spray powder and film that contain rare-earth element, and member provided with film

A thermal spray powder of the present invention contains a rare earth element and a diluent element that is not a rare earth element or oxygen, which is at least one element selected, for example, from zinc, silicon, boron, phosphorus, titanium, calcium, strontium, and magnesium. A sintered body of a single oxide of the diluent element has an erosion rate under specific etching conditions that is no less than 5 times the erosion rate of an yttrium oxide sintered body under the same etching conditions.

A thermal spray powder contains granulated and sintered particles composed of an oxide of any of the rare earth elements having an atomic number from 60 to 70. The average particle size of the primary particles constituting the granulated and sintered particles is 2 to 10 &#x3bc;m. The crushing strength of the granulated and sintered particles is 7 to 50 MPa. A plasma resistant member includes a substrate and a thermal spray coating provided on the surface of the substrate. The thermal spray coating is formed by thermal spraying, preferably plasma thermal spraying, the thermal spray powder.

Thermal spray powder, method for forming thermal spray coating, and plasma resistant member

A thermal spray powder includes granulated and sintered yttria particles obtained by granulating and sintering a raw material powder in air or oxygen. The primary particles constituting the granulated and sintered yttria particles have an average particle size between 0.5 and 1.5 &#x3bc;m inclusive, and 1.11 times or more as large as the raw material powder. Alternatively, the primary particles have an average particle size between 3 and 8 &#x3bc;m inclusive.

Thermal spray powder and method for forming a thermal spray coating

A thermal spray powder including cermet particles, each of which contains metal containing at least one selected from the group consisting of cobalt, chrome, and nickel, and tungsten carbide. The ratio of the summed weight of cermet particles having a particle size of 25 &#x3bc;m or more in the thermal spray powder with respect to the summed weight of the entire cermet particles in the thermal spray powder is 0.5 to 15%. A thermal spray coating formed from the thermal spray powder is suitable for the formation of a tungsten carbide-based cermet thermal spray coating for use in rolls such as corrugated rolls.

Thermal spray powder and thermal spray coating

A thermal spray coating is made of cermet and provided on the surface of a base. The value that is gained by further dividing the value, which is gained by dividing the coefficient of thermal expansion of the thermal spray coating by the thickness of the thermal spray coating (unit: &#x3bc;m), by the coefficient of thermal expansion of the base is set to a value no less than 0.15&#xd7;10. Accordingly, peeling and cracking of the thermal spray coating can be prevented from being caused by the difference in the coefficient of thermal expansion between the thermal spray coating and the base.

Thermal spray coating and thermal spray powder

A thermal spraying powder contains granulated and sintered particles of an yttrium-aluminum double oxide formed by granulating and sintering raw-material particles. The crushing strength of the granulated and sintered particles is 15 MPa or more, and 10% particle size of the granulated and sintered particles is 6 &#x3bc;m or more. The thermal spraying powder is suitable for use in forming a thermal spray coating through plasma spraying.

Yttrium-aluminum double oxide thermal spraying powder

A thermal spray powder contains particles composed of an oxide of any of the rare earth elements having an atomic number of 39 or from 59 to 70. The crushing strength of the particles is 80 MPa or greater. The ratio of bulk specific gravity to true specific gravity of the thermal spray powder is 0.15 or greater. The particles are preferably granulated and sintered particles. The average particle size of primary particles constituting the granulated and sintered particles is preferably 6 &#x3bc;m or less.

Thermal spray powder and method for forming thermal spray coating

A thermal spray powder contains granulated and sintered yttria particles and fine yttria particles, the average particle diameter of the fine yttria particles being no more than 1 &#x3bc;m. The content of the fine yttria particles in the thermal spray powder is 1,000 to 10,000 ppm by mass. It is preferred that the thermal spray powder be used in applications for forming a thermal spray coating by plasma thermal spraying at atmospheric pressure.

Yttria thermal spray powder and method for forming a thermal spray coating

A thermal spraying powder includes granulated and sintered particles of an yttrium-aluminum double oxide obtained by granulating and sintering a raw powder containing yttrium and aluminum. The total volume of fine pores having a diameter of 6 &#x3bc;m or less in one gram of the granulated and sintered particles is 0.06 to 0.25 cm. The thermal spraying powder reliably forms a thermal spray coating that is suitable for use where the thermal spray coating is subjected to a thermal shock in a corrosive atmosphere or an oxidative atmosphere and for use where the thermal spray coating is subjected to a thermal shock in a state where the thermal spray coating contacts a member that has reactivity to a base material.

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Kakamigahara, Japan

Junya Kitamura