Honda Motor Co., Ltd.

Junya Funatsu

Koji Kobayashi

Nobuhiko Yoshimoto

Kaoru Kojina

A film forming apparatus () includes a mask body () configured to expose inner surfaces () of cylinder bores (), and mask an inner surface () of a crankcase (). The mask body () includes a main body portion (), a sealing member () and a biasing member (). The main body portion () is configured to stretch and contract, and includes a first tubular member () and a second tubular member () configured to have an insert structure at least part of which is slidable along an axial direction. The main body portion () can stretch and contact in a state where at least one end in the axial direction thereof contacts an inner surface of a cylinder block (). The sealing member () is interposed between sliding surfaces of the first tubular member () and the second tubular member (). The biasing member () is configured to resiliently bias the first tubular member () and the second tubular member () in a stretching direction of the main body portion ().

Film forming apparatus

The present invention provides a method for cleaning a carbon coating film, which can clean the carbon coating film that is formed on each portion of a plasma CVD device, and provides the plasma CVD device. The plasma CVD deviceincludes: first and second sealing membersandwhich are formed of insulators and seal both ends of a workpiece W or a dummy workpiece W', respectively; an anode; decompression unitswhich decompress the inside of the workpiece W or the dummy workpiece W&#x2032;; a source-gas supply unitwhich supplies a source gas to the inside of the workpiece W; a power source; and an oxygen-gas supply unitwhich supplies oxygen gas to the inside of the dummy workpiece W&#x2032;.

Carbon-coating-film cleaning method and device

The film forming apparatus includes a mask member and a shield member. The mask member is made of a cylindrical insulation material that can expose inner surfaces of cylinder bores, and mask the inner surface of a crankcase. The shield member is made of a metal material disposed along an inner surface of the mask member.

Provided is a preliminary treatment method for a workpiece capable of shortening a cycle time by preventing a nodule from being formed on a carbon film. The preliminary treatment method for the workpiece is performed before a carbon film is formed on a surface of a workpiece W. A bias voltage is applied to the workpiece W disposed in a treatment space S maintained at a predetermined vacuum degree while an oxygen gas is supplied to the treatment space S before a material gas is supplied to the treatment space S, oxygen plasma is generated along the surface of the workpiece W, and oxygen, hydrogen, or water stuck to the surface of the workpiece W is removed.

Growing community of inventors

Tochigi-ken, Japan

Junya Funatsu