Shanghai Micro Electronics Equipment (Group) Co., Ltd.

Junwei Jia

Fan Wang

Wen Kang Xu

Hailiang Lu

Pengli Zhang

Hongji Zhou

An automatic optical inspection (AOI) device and method are disclosed. The device is adapted to inspect an object under inspection (OUI) () carried on a workpiece stage () and includes: a plurality of detectors () for capturing images of the OUI (); a plurality of light sources () for illuminating the OUI () in different illumination modes; and a synchronization controller () signal-coupled to both the plurality of detectors () and the plurality of light sources (). The synchronization controller () is configured to directly or indirectly control the plurality of detectors () and the plurality of light sources () based on the position of the OUI () so that each of them is individually activated and deactivated according to a timing profile, that each of the detectors () is able to capture images of the OUI () in an illumination mode provided by a corresponding one of the light sources (), and that when any one of the light sources () is illuminating the OUI (), only the one of the detectors () corresponding to this light source () is activated. Through the timing control over the multiple light sources () and detectors () by the synchronization controller (), inspection with multiple measurement configurations can be accomplished within a single scan, resulting in a significant improvement in inspection efficiency.

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Shanghai, China

Junwei Jia