Tokyo Electron Limited

Innovusion, Inc.

Timbre Technologies, Inc.

Seyond, Inc.

Innovusion Ireland Limited

Kla Tencor Corporation

Other

Baidu USA LLC

Advanced Micro Devices Corporation

Junwei Bao

Yimin Li

Rui Zhang

Vi Vuong

Shifang Li

Nickhil Jakatdar

Xinhui Niu

Emmanuel Drege

Srinivas Rao Doddi

Wen Jin

Yufeng Li

Wei Liu

Manuel B Madriaga

Joerg Bischoff

Jeffrey Alexander Chard

Hong Qiu

Yan Chen

Haosen Wang

Jim Weijian Li

Peng Wan

Hemalatha Erva

Ching-Ling Meng

Holger Tuitje

Mihail Mihaylov

Jason Ferns

Lawrence Lane

Ning-Yi Neil Wang

Jim Li

Gang Zhou

Sebastien Egret

Gang He

Leonid Poslavsky

Sanjay K Yedur

Ji Li

Hanyou Chu

Micah Ledbetter

Wesley M Shao

Lie-Quan Lee

Sachin Deshpande

Ying Zhu

Tri Thanh Khuong

Kelly Barry

Pranav Sheth

Miao Liu

Weichert Heiko

Bhanwar Singh

Ping Wang

John Josef Hench

Wenge Yang

Xinkang Tian

Daniel Joseph Prager

Jun Pei

Youxian Wen

Carmen L Morales

Davy Huang

Victor D Liu

Zheng Yan

Weiyu Wendy Lu

Heiko Weichert

Yasuhiro Okumoto

Michael Laughery

Alan Nolet

Mike Laughery

Cristina Cheung

Weiwen Xu

Wendy Lu

Zheng Yang

Hong Qui

Zhaoqiang Peng

Huitao Sun

Yang Han

Ning-Yi Wang

Randy Xi Li

Gil Salman

Barry Loveridge

Jay Bhakta

Shifang Ll

Doris Chin

Jin Wen

Haixing Zou

Andrew Yao

LiDAR system and methods discussed herein use ultrafast light pulses. Use of ultrafast light pulses can result in reduced power consumption compared to longer length or conventional light pulses.

Ultrashort pulses in LiDAR systems

In accordance with some embodiments, a light detection and ranging (LiDAR) system comprises: a light source configured to generate a pulse signal from the LiDAR system; one or more mirrors configured to steer a returned light pulse associated with the transmitted pulse signal along an optical receive path; a field lens positioned along the optical receive path, wherein the field lens is configured to redirect the returned light pulse; a fiber having a receiving end configured to receive the returned light pulse from the field lens along the optical receive path; and a light detector configured to receive the returned light pulse from an end of the fiber opposite the receiving end.

Receive path for LiDAR system

The present disclosure describes a system and method for coaxial LiDAR scanning. The system includes a first light source configured to provide first light pulses. The system also includes one or more beam steering apparatuses optically coupled to the first light source. Each beam steering apparatus comprises a rotatable concave reflector and a light beam steering device disposed at least partially within the rotatable concave reflector. The combination of the light beam steering device and the rotatable concave reflector, when moving with respect to each other, steers the one or more first light pulses both vertically and horizontally to illuminate an object within a field-of-view; obtain one or more first returning light pulses, the one or more first returning light pulses being generated based on the steered first light pulses illuminating an object within the field-of-view, and redirects the one or more first returning light pulses.

2D scanning high precision LiDAR using combination of rotating concave mirror and beam steering devices

Embodiments discussed herein refer to LiDAR systems to focus on one or more regions of interests within a field of view.

LiDAR systems and methods for focusing on ranges of interest

A system for multimodal detection is provided. The system comprises a light collection and distribution device configured to perform at least one of collecting light signals from a field-of-view (FOV) and distributing the light signals to a plurality of detectors. The light signals have a plurality of wavelengths comprising at least a first wavelength and a second wavelength. The system further comprises a multimodal sensor comprising the plurality of detectors. The plurality of detectors comprises at least a light detector of a first type and a light detector of a second type. The light detector of the first type is configured to detect light signals having a first light characteristic. The light detector of the first type is configured to perform distance measuring based on light signals having the first wavelength. The light detector of the second type is configured to detect light signals having a second light characteristic.

Multimodal detection with integrated sensors

The present disclosure describes a system and method for LiDAR scanning. The system includes a light source configured to generate one or more light beams; and a beam steering apparatus optically coupled to the light source. The beam steering apparatus includes a first rotatable mirror and a second rotatable mirror. The first rotatable mirror and the second rotatable mirror, when moving with respect to each other, are configured to: steer the one or more light beams both vertically and horizontally to illuminate an object within a field-of-view; redirect one or more returning light pulses generated based on the illumination of the object; and a receiving optical system configured to receive the redirected returning light pulses.

High resolution LiDAR using high frequency pulse firing

Embodiments discussed herein refer to using LiDAR systems for steering consecutive light pulses using micro electro-mechanical system (MEMS) to illuminate objects in a field of view. Embodiments discussed herein also refer to using a multiple lens array to process returned light pulses.

Lidar systems and methods with beam steering and wide angle signal detection

In accordance with some embodiments, a light detection and ranging (LiDAR) system comprises: a control system housing; a first LiDAR head housing separate and distinct from the control system housing; a light source within the control system housing, the light source configured to produce a first pulse signal; a light detector within the control system housing configured to detect a first return pulse signal associated with the pulse signal; a first pulse steering system within the first LiDAR head housing, the first pulse steering system configured to direct the first pulse signal in a first direction; a first fiber configured to carry the first pulse signal from the light source to the first pulse steering system; and a second fiber configured to carry a first returned pulse signal from the first LiDAR head housing to the light detector.

Distributed LiDAR systems

Embodiments discussed herein refer to a relatively compact and energy efficient LiDAR system that uses a multi-plane mirror in its scanning system.

LiDAR detection systems and methods that use multi-plane mirrors

A compact LiDAR device is provided. The compact LiDAR device includes a first mirror disposed to receive one or more light beams and a polygon mirror optically coupled to the first mirror. The polygon mirror comprises a plurality of reflective facets. For at least two of the plurality of reflective facets, each reflective facet is arranged such that: a first edge, a second edge, and a third edge of the reflective facet correspond to a first line, a second line, and a third line; the first line and the second line intersect to form a first internal angle of a plane comprising the reflective facet; and the first line and the third line intersect to form a second internal angle of the plane comprising the reflective facet. The first internal angle is an acute angle; and the second internal angle is an obtuse angle.

Compact LiDAR design with high resolution and ultra-wide field of view

In accordance with some embodiments, a light detection and ranging (LiDAR) scanning system includes a light source. The light source is configured to transmit a pulse of light. The LiDAR scanning system also includes a beam steering apparatus configured to steer the pulse of light in at least one of vertically and horizontally along an optical path. The beam steering apparatus is further configured to concurrently collect scattered light generated based on the light pulse illuminating an object in the optical path. The scattered light is coaxial or substantially coaxial with the optical path. The LiDAR scanning system further includes a light converging apparatus configured to direct the collected scattered light to a focal point. The LiDAR scanning system further includes a light detector, which is situated substantially at the focal point. In some embodiments, the light detector can include an array of detectors or detector elements.

Embodiments discussed herein refer to LiDAR systems and methods that monitor for fault conditions that could potentially result in unsafe operation of a laser. The systems and methods can monitor for faulty conditions involving a transmitter system and movement of mirrors in a scanning system. When a fault condition is monitored, a shutdown command is sent to the transmitter system to cease laser transmission. The timing by which the laser should cease transmission is critical in preventing unsafe laser exposure, and embodiments discussed herein enable fault detection and laser shutoff to comply with laser safety standards.

Lidar safety systems and methods

A light detection and ranging (LiDAR) system includes a rotatable polygon having a plurality of reflective sides including a first reflective side. The rotatable polygon configured to scan one or more first light signals in a first direction. The LiDAR system also includes a scanning optic configured to scan the one or more first light signals in a second direction different than the first direction. A first light source is configured to direct the one or more first light signals to one or more of the plurality of reflective sides of the rotatable polygon or the scanning optic. A first detector is configured to detect a first return light signal associated with a signal of the one or more first light signals. One or more optics are configured to focus the first return light signal on the first detector.

2-dimensional steering system for lidar systems

Growing community of inventors

Palo Alto, CA, United States of America

Junwei Bao