Shanghai Micro Electronics Equipment (Group) Co., Ltd.

Shanghai Micro Electronics Equipment Co., Ltd.

Junpeng Chen

Gang Wang

Kai Liu

Xiaoyu Jiang

Rongjun Zhang

Dongliang Huang

Yichao Shi

The present invention provides a linear module, which includes a casing, and a linear transmission device (). The casing has an internal cavity, in which the linear transmission device () is at least partially disposed, and an output opening () which extends along a movement direction of the linear transmission device () defined on the case. A sealing band () is arranged at the output opening (). The linear module further includes a first rolling mechanism () which is moveable in synchronization with the linear transmission device () and is arranged on a side of the sealing band () which is away from the internal cavity. The first rolling mechanism () is in rolling contact with the sealing band (). This linear module enables high cleanliness and has good sealing performance, high accuracy and high stability.

Linear module and operating method thereof

A wafer holder and a wafer transfer apparatus, system and method are disclosed. The wafer holder is mounted onto the wafer transfer apparatus and includes a holder body and a sucker. The holder body defines a first opening, while the sucker includes a first skirt. The first skirt is located on one side of the holder body and connected to the first opening. A groove is formed at a joint between the first skirt and the first opening. The groove is located at an outer side of the first skirt, and is able to relief stresses produced at a base portion of the sucker during deformation of the first skirt.

Wafer holder and wafer transfer apparatus, system and method

Growing community of inventors

Shanghai, China

Junpeng Chen