Ulvac, Inc.

Other

Research Development Corporation of Japan

Nihon Shinku Gijutsu Kabushiki Kaisha

Kabushiki Kaisha Yaskawa Denki Seisakusho

Research Development Corporation

Ulvac Cryogenics Inc.

Junpei Yuyama

Hirofumi Minami

Mitsuru Yahagi

Yasuzo Tanaka

Eiichi Goto

Masao Murata

Makoto Takahashi

Shinya Ito

Toshio Koike

Hiroto Uchida

Kenji Ago

Takafumi Kawaguchi

Koji Hane

Qiquan Geng

Hiroshi Koshina

Takanori Tsuji

Kyuzo Nakamura

Takeo Suzuki

Yuya Inoue

Yoshio Sunaga

Takahiro Miyata

Takumi Namekawa

Masasuke Matsudai

Kou Fuwa

Yoshinobu Murayama

Tooru Okuno

Kazunori Chihara

Humio Naruse

Mitsuki Terashima

Hidetoshi Morimoto

Shinji Furuya

Hidenori Suwa

Kouji Hane

Atsushi Kira

Ai Tanaka

Susumu Sakio

Shuichi Yamasaki

Taku Komuro

A coated film with no observable streak is formed. The landing positions of a first discharge liquid discharged through a first printing head and the landing positions of a second discharge liquid discharged through a second printing head are disposed in a mixed manner in an area on a substrate where the first printing head and the second printing head overlap. Which discharge liquids are to be landed is determined according to random numbers. Since a coated film which is formed with the first and second discharge liquids in a mixed manner is disposed between a coated film formed with the first discharge liquids and a coated film formed with the second discharge liquids, a boundary is obscured and no streak appears.

Coated film forming method

A stage apparatus enables easy position alignment at a real installation site. Mountshaving sub base platesarranged thereon are provided on carriagesand thereby constitute sub mounting tablesto; and the mountsare fixed to a main mounting tablehaving a main base plate. The positions of main base plateand sub base platesare aligned with each other by adjustment mechanismsprovided on the sub mounting tablesto. As main positioning membersand sub positioning membersare arranged on the main mounting tableand sub mounting tablesto, separation can be performed so that a state of position alignment is restorable. Accordingly, position alignment is easy when assembling after transportation.

Stage apparatus

An assembling method that is high in assembly accuracy and easily performed at the actual installation site is provided. In this method, the sub base plates on the sub mounting tables are aligned with respect to a main base plate on a main mounting table at a temporary installation site, and the state thereof is maintained. Then, the main mounting table and the sub mounting tables are separated from each other to be transferred to the actual installation site, and the positioning state is restored at the actual installation site. Since a positional alignment can be performed at the temporary installation site, the work required at the actual installation site can be reduced. Furthermore, since a fine adjustment can be performed at the actual installation site, the accuracy in the positional alignment can be improved.

Stage apparatus assembling method

A technology for placing spacers free from the occurrence of streaks is provided. Random numbers are generated by a computer, and made in one-by-one association with discharge positions of an object for discharging every generation, and stored in a memory unit of the computer. Coefficient values are determined for the respective discharge positions based on the stored random numbers, and individual voltage values to be required for the respective discharge positions are calculated through the multiplication of voltages set for respective nozzle holes Nto Nby the coefficient values. When the respective voltages corresponding to the discharge positions are applied to piezoelectric elements inside a discharge head and a discharge liquid containing the spacers are discharged through the plural nozzles Nto Nprovided in the discharge head, the spacers are placed on the object for discharging by numbers according to the random numbers.

Spacer placing method

A stage apparatus that achieves a high accuracy in assembling and enables easy work at a real installation site. In a stage apparatus of the present invention, sub rails are arranged on respective sub base plates, which are connected respectively with the first and second main rails on a main base plate to extend the first and second main rails. Accordingly, when the sub base plates are fixed to the main base platewith positional alignment performed therebetween, the accuracy in positional alignment of the sub base plates which has already been fixed to the main base plate is not affected.

Providing a spacer forming method by which spacers can be securely formed in a predetermined region on a substrate. Ink containing granular spacers is jetted onto a crossing portion of a black matrixin the shape of a lattice. Red pixel R, green pixel G and blue pixel B are formed in the openings of the lattice. The spacer containing ink is jetted onto the spacer forming positions from the nozzle by the ink jetting method. Plural drops of inkare jetted onto each of the spacer forming positions on one of the opposite substrates E. The gap between the opposite substrates E can be securely maintained at a constant for filling with liquid crystal.

Spacer forming method and spacer forming apparatus

A transport apparatus which can properly transmit a rotary driving force of a rotating motor to a transport arm and can correctly detect an angle of rotation of a rotary driving shaft, thereby transporting an object to be transported in a transport unit to a correct position. The transport apparatus includes: a housing having an airtight structure; first to third driving shafts that are provided in the housing to be independently rotatable around a predetermined coaxial rotary shaft; permanent magnets arranged at predetermined positions of the first to third driving shafts, respectively; and electromagnetic coils provided in the housing to correspond to the respective permanent magnets. Driving currents are supplied to the electromagnetic coils based on predetermined information, so as to move the first to third driving shafts. The object to be transported is transported by first and second linkages fixed to the first to third driving shafts.

Transport apparatus, control method for the same, and vacuum processing system

The invention has an object to provide a regenerator and cryogenics pump using a regenerator material which fulfills such requirements as specific heat, thermal conductivity, manufacturing easiness, strength, hardness, chemical stabilization and low cost instead of Pb which is environmentally harmful. In a regeneratorwhich contains regenerator materialin an internal path for refrigerant, and in which heat is exchanged between the helium gas as refrigerant, and regenerator material, regenerator materialis any one of Sn, Bi&#x2014;Sn alloy and Ag&#x2014;Sn alloy. The regenerator materialis spherical. Plural spheres are packed in the internal path of the regenerator

Regenerator and cryogenics pump

A transport apparatus includes first and second linkages. The first linkage includes first and third arms that can be rotated around a coaxial rotary shaft of first through third driving shafts coaxially arranged, and transports a first carrier. The second linkage includes a second arm and the third arm that can be rotated around the coaxial rotary shaft of the first through third driving shafts, and transports a second carrier. The first and second linkages are arranged to allow the first and second carriers to move beyond the coaxial rotary shaft of the first through third driving shafts without interfering with each other.

According to a first invention, since a flow of a spacer dispersed liquid is formed in a transporting chamber separated from a discharging chamber by an internal filter, the spacer dispersed liquid is stably discharged through an ejection hole, while the discharging chamber on a side of a nozzle plate is not affected by the flow of the spacer dispersed liquid. According to a second invention, since a spacer dispersed liquid does not flow inside a discharging chamber in a printing state in which the spacer dispersed liquid is discharged, the spacer dispersed liquid is stably discharged through an ejection hole. To the contrary, since the spacer dispersed liquid is directed inside both the discharging chamber and the transporting chamber in a waiting state in which the spacer dispersed liquid is not discharged, spacer particles in the spacer dispersed liquid do not settle.

Head module, printing apparatus, and printing method

This invention provides a transport apparatus having a simple configuration that can reduce its turning radius and transport semiconductor devices at high speed. The transport apparatus comprising the first and second arms having at a first end of each thereof a rotary drive shaft being arranged coaxially, and third and fourth arms rotatably linked at respective the first ends thereof to the respective second ends of the first and second arms. The second ends of the third and fourth arms are supported around centers of coaxially arranged spindles, respectively. The transport apparatus further comprises an articulating mechanism having an attitude control mechanism adapted to apply rotary forces with opposite phases to the respective spindles arranged at the third and fourth arms.

Transport apparatus and vacuum processing system using the same

A magnetic field measurement system including a pick-up coil is not moved but fixed. Strips of superconducting material are arranged in a plane with narrow slits between the strips. The strips are moved very near the pick-up coil along the plane. From output variations of a SQUID magnetometer during the movement, a magnitude of a static field perpendicular to the plane of the strips is obtained.

Apparatus for measuring weak static magnetic field using superconduction

In a refrigerator having a compressor settled in a room temperature portion and an expander which is connected to the room temperature portion, a piston of the expander is settled in the room temperature portion and pressure variation at a low temperature portion is transferred to the piston through a gas column in a pipe connecting the room temperature portion and the low temperature portion.

Refrigerator

A head with a pick-up coil is attached to a supporter so that the head is freely movable along the direction perpendicular to the surface of a superconductor. Fluid spouted from the spout hole of the head maintains the height (gap space) of the head from the surface. The head is firmly fixed to the supporter in the direction along the surface. Since the relative position of the head in the direction along the surface of the superconductor is changable by drive means for moving the superconductor or the head, the distribution of the magnetic flux which is trapped in the superconductor is measured by scanning the surface of the superconductor with pick-up coil.

Apparatus for positioning a pick-up coil for detecting magnetic flux

A wafer transferring hand is so constructed that at least three seats made of a soft low-friction material are provided in an integral manner, a groove having a width slightly wider than the thickness of the wafer is formed in the laterally arranged seats, the bottom of the groove being arcuated in a manner conforming to the periphery of the wafer, while a similar groove having an adjustable width is provided in the seat arranged at the center, the bottom of the groove being spaced apart outwardly from the periphery of the wafer, and at least two cut-away portions are provided between the seats so as to provide a gap between the periphery of the wafer and the bottom of the cut-away portion.

Growing community of inventors

Chigasaki, Japan

Junpei Yuyama