Samsung Electronics Co., Ltd.

Juno Park

Se-Ho Park

Tae-Hun Kim

Seok Heo

Yong-Won Lee

Kyung-Won Kang

Hyungjong Kim

Nam-Su Yuk

Euijin Kim

An apparatus for transferring a wafer includes a main body, a first support installed in the main body, a sensor support fixed to the first support, a finger member slidably installed along the first support to transfer the wafer and positioned at a lower level than the sensor support, three sensors each including a light emitter installed on the first support and a light receiver installed on the sensor support, the three sensors respectively configured to detect three points of an edge of the wafer seated on the finger member, and a controller connected to the three sensors, wherein the controller is configured to determine whether any of the three points of the edge of the wafer is detected from a notch of the wafer based on signals received from the sensors.

Apparatus for transferring wafer, method for transferring wafer using the same with three sensors

A cassette transfer apparatus includes a holding unit configured to hold a cassette having a wafer loaded therein, the cassette having at least one stepped part, and the holding unit including at least one holding part configured to have the at least one stepped part placed thereon. The at least one stepped part includes a pair of stepped parts provided at opposite surfaces of the cassette, and the at least one holding part includes a pair of holding parts that extends back and forth and is configured to have the pair of stepped parts placed thereon.

Cassette transfer apparatus and cassette transferring method using the same

Growing community of inventors

Yongin-si, South Korea

Juno Park