Mitsubishi Denki Kabushiki Kaisha

Junji Takehara

Kenta Kawahara

Tomoyuki Kobayashi

Taroh Harima

Industrial robot

A wafer holding hand of the present invention is constituted so that two fixed clamps (,) and one movable clamp (,) are provided on a finger (,). The movable clamp (,) is supported by a plate spring (,) via a clamp holder (,), and the plate spring (,) is fixed to the slider (,). The slider (,) is driven by an air cylinder (,). The fixed clamp (,) is hook shaped, and the movable clamp (,) is drum shaped. A wafer W is held at three points by the movable clamp (,) and the two fixed clamps (,), and a force is applied to the movable clamp (,) by the plate spring (,) so as to hold the wafer W.

Wafer holding hand

An industrial robot allowing one-way assembly, size reduction and long cable life includes a first member; a second member which swivels relative to the first member; a third member which swivels relative to the second member; a first drive unit provided at the first member for swiveling the second member; a second drive unit provided at the second member for swiveling the third member; a cable passing inside of the first and second members for feeding power or a signal to the second drive unit; a first fixing member for fixing a portion of the cable to an end portion of the first or second member; a second fixing member for fixing another portion of the cable to an end portion of the first or second member; and a bent cable provided between the first and second fixing members so as to be bent in a U-shape, the bent cable being provided at either one of the first and second members and arranged at a portion of an output shaft of the first drive unit with a bent portion thereof as one end thereof and with portions fixed to the first and second fixing members as other ends thereof.

Growing community of inventors

Tokyo, Japan

Junji Takehara