Hitachi, Ltd.

Hitachi Engineering Service

Junji Sato

Akitomi Semba

Kenichi Hattori

Tadashi Sonobe

Atsushi Ishihara

Takashi Watanabe

Hideaki Mori

Eiji Tsuji

Shinsaku Hakuta

Yasuomi Yagi

Kazumasa Ide

Ryoichi Shiobara

Akiyoshi Komura

Takuya Fukuda

Mitsunori Yamashina

Miyoshi Takahashi

Kazuo Suzuki

Shinichi Wakui

Fumiyuki Kanai

Satoru Todoroki

Yoko Yamashina

Hidenari Otani

Yasuomi Yaji

Shunichi Hirose

Atsushi Tsuchiya

A rotating electric machine having a plurality of ventilating passages formed between a stator frame and a stator iron core and coolers which cool a coolant being provided in the plurality of the ventilating passages. A ventilating circuit in which at least a portion of the coolant which is cooled by one of the coolers is further cooled by another of the coolers, and is allowed to flow to a central portion in an axial direction of the stator iron core in a direction from an outer peripheral side to an inner peripheral side of the stator iron core at least via one ventilating passage of the plurality of ventilating passage which communicates with the central portion in the axial direction of the stator iron core.

Rotating electric machine and cooling method thereof

A rotating electric machine having a plurality of ventilating passages formed between a stator frame and a stator iron core, a cooler which cools a coolant is provided at least in one ventilating passage, communicating with a central portion of the stator iron core, of the plurality of ventilating passages, and a ventilating circuit in which the coolant cooled by the cooler is allowed to flow to the central portion of the stator iron core in a direction from an outer peripheral side to an inner peripheral side of the stator iron core via the at least one ventilating passage which communicates with the central portion of the stator iron core.

Rotating electric machine

A rotating electric machine exhibits a substantially level axial temperature rise distribution by supplying a coolant which is sufficiently cooled to a central portion of an iron core which is most distant from each of the axial ends of the iron core. A plurality of ventilating passages, which continuously extend in the peripheral direction, are provided in the axial direction between a stator frame and a stator iron core, and coolers are provided in the ventilating passages. A coolant boosted by a booster is cooled by the coolers and is allowed to flow to a central portion of the stator iron core in the direction from the outer peripheral side to the inner peripheral side of the stator iron core via ventilating passages which communicate with the central portion of the stator iron core.

Dynamo-electric machine

A rotating machine having a stator core and coolers for cooling a cooling medium which is circulated inside the machine by the rotation of a fan installed near a rotating axis of the rotating machine. The coolers being installed in a ventilation passage for the cooling medium and including at least one cooler installed in one ventilation passage extending from an exhaust side of the fan to a suction side of the fan via the stator core, and at least another cooler installed in another ventilation passage extending from the exhaust side of the fan in the one ventilation passage to an inside of an inner surface of the stator core.

Rotating machine with plural coolers in plural ventilation passages

In order to make any voltage imbalance between the winding circuits of each phase small and to simplify the edge structure of the armature winding, in a rotating electric machine of four poles, having slots of 9n (1&lE;n&lE;7) pieces provided for the stator core with a double-layer winding per each slot, and an armature winding of three-phase star connection being constituted with three winding circuits connected in parallel in each phase, two of the four poles of each phase are constituted with only one of the three winding circuits.

Armature winding and rotating electric machine using the same

A rotating machine having a stator core and being equipped with coolers for cooling a cooling medium which is circulated inside the machine by the rotation of a fan installed near a rotating axis of the rotating machine. The coolers are installed in a ventilation passage for the cooling medium and include a primary cooler installed in a primary ventilation passage extending from an exhaust side of the fan to a suction side of the fan via the stator core, and a secondary cooler installed in a secondary ventilation passage extending from the exhaust side of the fan in the primary ventilation passage to an inside of an inner surface of the stator core via the stator core.

Rotating machine

A rotating machine having a core and being equipped with coolers for cooling a cooling medium which is circulated inside the machine by the rotation of a fan installed near the rotating axis. The coolers are installed in a ventilation passage for the cooling medium and comprise a primary cooler installed in a primary ventilation passage extending from the exhaust side of a fan installed near the rotating axis to the suction side of said fan via the core, and a secondary cooler installed in a secondary passage that is branched from the primary ventilation passage.

A rotating machine equipped with coolers for cooling a cooling medium which is circulated inside the machine by the rotation of a fan installed on the rotating axis. The coolers includes two or more coolers installed in a ventilation passage for the cooling medium. At least part of the cooling medium cooled by one cooler is further cooled by another cooler.

A rotating machine having a stator core and being equipped with coolers for cooling a cooling medium which is circulated inside the machine by the rotation of a fan installed near the rotating axis. The coolers are installed in a ventilation passage for the cooling medium and comprise a primary cooler installed in a primary ventilation passage extending from the exhaust side of a fan installed near the rotating axis to the suction side of the fan via the stator core, and a secondary cooler installed in a secondary ventilation passage extending from the exhaust side of the fan in the primary ventilation passage to the inside of the inner surface of the stator core via the stator core.

In order to provide a rotating machine in which the temperature increase distribution inside the machine can be equalized, not only is a primary cooler installed in the primary ventilation passage that extends from the exhaust side of the fans and installed on the rotating axis to the suction side of the fans and via the core, but a secondary cooler is installed in the secondary ventilation passage that is branched from the primary ventilation passage, thus making it possible to further cool part of the cooling medium, which has once been cooled by the primary cooler, by means of the secondary cooler, that is, to cool the cooling medium by circulating it through the coolers twice.

A microwave plasma processing apparatus is provided with a vacuum chamber, a substrate holder for mounting a substrate to be processed, a reactive gas feed port, a cleaning gas feed port, a plasma generation device for generating a processing plasma from the reactive gas and a cleaning plasma from the cleaning gas, and a high-frequency electric field application device for applying an electric field having a frequency that allows ions in the cleaning plasma to follow changes in the electric field. The high-frequency electric field application device is activated to apply the electric field to the cleaning plasma so as to remove substances that have been deposited on the surfaces of the vacuum chamber and substrate holder due to the processing of the substrate by the processing plasma, thereby cleaning up the vacuum chamber and substrate holder.

Microwave plasma processing apparatus

The present invention relates to a microwave plasma processing apparatus for processing such as thin film formation, etching, sputtering, and plasma oxidation, etc., on a surface of a processing object by utilizing a high density plasma generated by electron cyclotron resonance. A vacuum vessel of the apparatus, in which a microwave transmitted by a microwave guide is utilized for converting gas supplied to the vacuum vessel to plasma for the plasma processing of the processing object placed in the vacuum vessel, is formed in, such manner that the interior space of the vacuum vessel extends beyond the outer periphery of magnetic field generating coils, and the extended portion of the vessel is provided with a gas outlet for connection with an evacuation apparatus to evacuate the interior of the vacuum vessel to a desired vacuum degree. Accordingly, preferable evacuating characteristics can be obtained even in a case when a large amount of the reaction gas is supplied to the vacuum vessel in order to process a large size processing object, because the vacuum vessel in which the processing object is placed can be connected with the evacuation apparatus through a space and the same effect as if the evacuation apparatus is directly connected with the vacuum vessel is realized.

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Hitachi, Japan

Junji Sato