Nippon Pillar Packing Co., Ltd.

Junji Omiya

Masato Wada

Osamu Suzuki

Nobuhito Hirakawa

Jotaro Inoue

Yusuke Kamon

Isao Tanaka

A multi-channel rotary joint with which a plurality of fluids of the same or different types can be made to flow as desired, including first connecting spaces sealed by mechanical seals and second connecting spaces sealed by mechanical seals and by elastic seals, such connecting spaces being between a joint housing and a rotator. A series of fluid passages that pass through the connecting spaces are also formed in the joint housing and the rotator. The mechanical seals are end-contact type seals and comprise balanced seals with a balance ratio &kgr; such that 0&lE;&kgr;&lE;1. Each elastic seal has a U-shaped cross section and is engaged and fixed to one of the opposing peripheral surfaces in a state in which an annular groove between inner and outer peripheral lips opens into the space with the higher pressure out of the second connecting space and its adjacent space.

Multi-channel rotary joint

A multi-channel rotary joint comprising-elastic seal rings each having an annular groove that are used to form a low-pressure channel space and a high-pressure channel space between the opposing peripheral surfaces of a joint housing and a rotator that rotates inside the joint housing. Seal rings that seal the low-pressure channel space which forms part of a vacuum suction route are engaged with and supported by one of the opposing peripheral surfaces such that annular grooves are disposed symmetrically and opening into spaces adjacent to the low-pressure channel space. The seal rings that seal the high-pressure channel space which forms part of a pressurized fluid supply route are engaged with and supported by one of the opposing peripheral surfaces such that the annular grooves are disposed symmetrically and opening into this high-pressure channel space.

A rotary joint for fluids that provides a completely sealed path for the flow of polishing solution and which permits the supply of electricity to a polished surface detector. The rotary joint of the present invention is essentially made up of a joint block (,) and a rotator assembly (,). To the rotator assembly (,) rotatably held in the joint block (,) is attached a polishing pad shaft (,). Between the joint block (,) and the rotator assembly (,) is formed a seal space closed by a pair of seal units (,), each comprising sealing rings (,) which rotate in relation to each other. A fluid passage (,) continuous via a seal space (,) and running through the joint block (,) and the rotator assembly (,) is formed, and a wiring conduit running from an electric source unit (,) to the polished surface detector on the polishing pad (,) is also formed. The wiring conduit comprises a rotary connector unit (,) made up of a casing (,) and a first connector (,) supported by the rotator assembly (,) and a second connector (,) held by the joint block (,) with the two connectors (,) electrically connected to each other and relatively rotatable, electric wiring (,) running from the power unit (,) to the second connector (,), and electric wiring (,) running from the first connector (,) to the polished surface detector (,) through a wiring conduit (,) formed in the rotator assembly (,).

Rotary joint for fluid

A space between a housing and a rotator is hermetically sealed with a double-mechanical seal. A pair of rotary seal rings are sandwiched between a pair of stationary seal rings while sandwiching therebetween a stopper ring for inhibition of relative rotation between the rotary seal rings and the rotator. A spring is interposed in a space between the stopper and each of the rotary seal rings for pressing each rotary seal ring against the corresponding stationary seal ring.

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Osaka, Japan

Junji Omiya