Tokyo Ohka Kogyo Co., Ltd.

Junji Kutsuzawa

Futoshi Shimai

Hidenori Miyamoto

Hiroyoshi Sago

Koichi Nagasawa

Shigemi Fujiyama

Kazunobu Yamaguchi

Yoshihito Kai

A liquid chemical treatment apparatus includes a coating apparatus for applying a coating liquid such as resist onto the surface of a substantially planar substrate such as a glass substrate. The coating apparatus includes a nozzle with an elongate injection outlet such as a slit with a width substantially the same as that of the substrate, and a liquid circulating passage connected to the nozzle for supplying the coating liquid to the nozzle. Mechanisms are provided with the circulating passage and the nozzle to remove air from the liquid, and to maintain the circulating liquid at a substantially constant temperature and a substantially constant flow rate. When performing a coating operation with the coating liquid, a flow amount thereof is increased up to 1,500 though 3,000 ml/min, from a condition under which the liquid is prevented from dropping from the slit-like injection outlet while circulating within the circulating passage at a flow rate of 500 through 700 ml/min, for example, by closing a valve or by means of a pump 35 included with the passage. The liquid output from the slit-like injection outlet 4 takes on the form of a curtain to be applied over substantially the entire surface of the substrate, without any drops of the coating liquid remaining within the nozzle after the coating operation.

Chemical liquid treatment apparatus

A cleaning device for cleaning a slit-like nozzle having an opening of a predetermined breadth for discharging liquid paint, with uniformity and with a small amount of cleaning liquid, wherein under a condition that a nozzle N is mounted on receiver plates 4, 4, a substantially air-tight space is formed, and a gas supply conduit is opened at one end of a cleaning portion 2 in the direction of the breadth of the nozzle, and an exhaust conduit 7 is opened at the other end thereof, being disposed in a vicinity of the gas supply conduit, so as to supply the cleaning liquid into the air-tight space. Then, since the air inside of the air-tight space is extracted from the exhaust conduit 7, the gas supplied from the one end flows towards the exhaust conduit 7 at the other end. The cleaning liquid contacts with the surface of the nozzle so as to dissolve and wash away any liquid paint adhering thereon.

Cleaning device and cleaning method for applicator nozzle

A coating nozzle includes an elongate nozzle body having a coating solution reservoir defined longitudinally therein for being supplied with a coating solution from an external coating solution supply. The elongate nozzle body also has a coating solution holder defined therein and opening away from the coating solution reservoir, for holding a coating solution against falling off as droplets under surface tension of the coating solution. A plurality of passages are defined in the elongate nozzle body and held in communication with the coating solution reservoir and the coating solution holder, for supplying the coating solution from the coating solution reservoir to the coating solution holder.

Method of coating substrate with coating nozzle

A coating nozzle includes an elongate nozzle body having a coating solution reservoir defined longitudinally therein for being supplied with a coating solution from an external coating solution supply. The elongate nozzle body also has a coating solution holder defined therein and opening away from the coating solution reservoir, for holding a coating solution against falling off as droplets under surface tension of the coating solution. A plurality of passages are defined in the elongate nozzle body and held in communication with the coating solution reservoir and the coating solution holder, for supplying the coating solution from the coating solution reservoir to the coating solution holder. The arrangement of the reservoir, the solution holder and the passages in the elongate nozzle body assures that a uniform layer of coating solution is deposited by the nozzle on a surface of a planar substrate.

Coating nozzle and coating device having coating nozzle

A removing unit for removing coating from the edge of a substrate has a vertical unit body housing a pair of pipes connected to a solvent reservoir and having respective solvent supply parts. The unit body has a head disposed in an upper end portion thereof. The head has a horizontal slot which opens at opposite ends thereof and at one side thereof for receiving an edge of a substrate. Solvent is supplied into the slot, drawn therealong and discharged from an end of the slot, all in a contained manner. A edge of a substrate is horizontally inserted into the slot so as to be immersed in the solvent contained in the slot, and the unit body is moved along the substrate edge so that the solvent cleans undesired coating from the edge.

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Kanagawa, Japan

Junji Kutsuzawa