Tocalo Co., Ltd.

Tokyo Electron Limited

Nsk Corporation

Other

Ebara Corporation

Daido Steel Co., Ltd.

Toyo Tanso Co., Ltd.

Daido Castings Co., Ltd.

Tokyo Electron Co., Ltd.

Junichi Takeuchi

Yoshio Harada

Nobuyuki Nagayama

Kouji Mitsuhashi

Tatsuya Hamaguchi

Manabu Yamada

Yuji Okada

Naozumi Nakata

Masaya Nagai

Yoshiyuki Kobayashi

Tetsuro Tojo

Takahiro Murakami

Jiro Hiraiwa

Hiroyuki Takabayashi

Yoshihiko Koyanagi

Kenichiro Togoe

Masamichi Kawasaki

Yoshinori Sumi

Koji Kuroda

Ryo Yamasaki

Hisamichi Nagahara

Keigo Kobayashi

Masashi Nagaya

Syuhei Nakahama

Seiki Matsuura

Shinichi Nishiguchi

Yasuhiro Takenaka

Shigeki Okunishi

Shinichi Kubo

Nobuyuki Tokyo Elect Yamanashi Co Ltd Nagayama

Kouji Tokyo Elect Yamanashi Co Ltd Mitsuhashi

A component for a hot-dip metal plating bath includes a base material and a thermal spray coating disposed to cover a surface of the base material. The base material includes ferritic stainless steel that contains: C: 0.10% to 0.50% by mass; Si: 0.01% to 4.00% by mass; Mn: 0.10% by mass to 3.00% by mass; Cr: 15.0% to 30.0% by mass; a total of Nb, V, Ti, and Ta: 0.9% by mass to 5.0% by mass; and a balance of Fe and unavoidable impurities. The ferritic stainless steel includes a microstructure that includes a ferrite phase as a main phase and a crystallized carbide, an area fraction of a Nb carbide, a Ti carbide, a V carbide, a Ta carbide, and a composite carbide thereof to the crystallized carbide of 30% or more. The hot-dip metal plating bath contains 50% by mass or more of Al.

Component for hot-dip metal plating bath

An insulated bearing includes a pair of bearing rings arranged concentrically to each other and rolling elements arranged to be rotatable between the pair of bearing rings, at least one of the bearing rings having an insulating layer formed thereon. The one of the bearing rings having the insulating layer formed thereon has an annular groove having an arc-shaped cross section formed on each of both end surfaces of the bearing ring. At least a surface from a non-raceway surface side circumferential surface to the annular groove of the bearing ring is covered by the insulating layer. The insulating layer is a ceramic thermal sprayed layer.

Insulated bearing

An insulated bearing includes an outer ring, an inner ring, and a plurality of rolling elements. At least one of the outer ring and an inner ring is made of metal, the plurality of rolling elements are provided between the outer ring and the inner ring, so as to be freely rolled, and at least one of the outer ring and an inner ring is coated with an insulating layer. The insulating layer is formed of a mixture in which silicon carbide and/or aluminum nitride as an additive are/is dispersed in aluminum oxide as a base matrix. The content of the additive is 1 to 40 mass % with respect to the total amount of the mixture.

Insulated bearing and bearing coating method

Improving the resistance of members and parts disposed inside of vessels such as semiconductor processing devices for conducting plasma etching treatment in a strong corrosive environment. A ceramic coating member for a semiconductor processing apparatus comprises a porous layer made of an oxide of an element in Group IIIb of the Periodic Table coated directed or through an undercoat on the surface of the substrate of a metal or non-metal and a secondary recrystallized layer of the oxide formed on the porous layer through an irradiation treatment of a high energy such as electron beam and laser beam.

Ceramic coating member for semiconductor processing apparatus

It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, AlOfilm formed on the undercoat as a middle layer and YOsprayed coating formed on the middle layer as a top coat.

Internal member for plasma-treating vessel and method of producing the same

It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al O film formed on the undercoat as a middle layer and Y O sprayed coating formed on the middle layer as a top coat.

Plasma processing container internal member and production method thereof

It is to provide an electrostatic chuck member having a strong adsorption force and an excellent responsibility (release property) in the stop of voltage application and is an electrostatic chuck member comprising a substrate, an undercoat of a metallic layer formed on at least one surface thereof, a lower insulating layer of Al O ceramic formed on the undercoat, a metallic electrode layer formed on the lower insulating layer and an upper insulating layer of Al O ceramic formed on the electrode layer as a topcoat.

Electrostatic chuck member and method of producing the same

An electrostatic chuck member includes a metal substrate, an undercoat of a metallic spray-coated layer and a topcoat of Al.sub.2 O.sub.3 TiO.sub.2 based spray-coated layer containing a Ti.sub.n O.sub.2n-1, where n=1-9, compound. The electrostatic chuck member has a large volume resistivity, a small scattering, and the quality is stable. A method for making the electrostatic chuck member includes subjecting a metal substrate to a blast treatment, spray-coating a metallic undercoat on a surface of the metal substrate, and spray-coating Al.sub.2 O.sub.3 TiO.sub.2 on to the metallic undercoat to form a Al.sub.2 O.sub.3 -TiO.sub.2 based layer in which at least a portion of the TiO.sub.2 is changed into Ti.sub.n O.sub.2, where n=1-9.

Electrostatic chuck member having an alumina-titania spray coated layer

Thermally sprayed coatings made from carbides of metals having greater carbon affinity than Cr in the presence of free carbon, or thermally sprayed coatings made from carbides of metals having smaller carbon affinity than Cr are heat treated in a chromium halide containing atmosphere which also contains hydrogen gas, whereby activated metallic Cr is precipitated in a fine particulate form, which is allowed to act on the thermally sprayed coatings, whereupon a Cr.sub.23 C.sub.6 -form carbide is created not only on the coating surface but also in its interior, particularly within pores, to form a modified layer, thereby compositing the thermally sprayed coatings.

Method of forming carbide-base composite coatings, the composite

A carbon member having an excellent bonding property is provided at its surface with a metal spray coating layer, and comprises a carbon substrate and a spray coating layer made from at least one metal selected from Cr, Ti, V, W, Mo, Zr, Nb and Ta or an alloy thereof, in which the coating layer has a ratio of linear expansion coefficient to carbon of 0.73-1.44 and a large chemical affinity to carbon at its interface.

Carbon member having a metal spray coating

Growing community of inventors

Hyogo, Japan

Junichi Takeuchi