Seiko Epson Corporation

Junichi Takeuchi

Ryuta Nishizawa

Michio Asahina

Kazuki Matsumoto

Naohiro Moriya

Takuya Kinugawa

Tomoyuki Kamakura

Yukihiro Hashi

Takashi Yamazaki

Akihiko Ebina

Hisahiro Ito

Takeshi Miyashita

Atsushi Kanda

Yoshitake Kobayashi

Eiji Suzuki

Akira Mizuguchi

Shoichi Nagamatsu

Takeshi Sakamoto

Kazuya Hayashi

Mamoru Endo

Tomohiro Jiromaru

Shin Takahashi

Miho Shiraki

A vibrator device includes: a base including a semiconductor substrate having an integrated circuit disposed at a first surface; a vibration element electrically coupled to the integrated circuit; and a lid having an end surface of a side wall bonded to the first surface at a bonding portion. A first circuit of the integrated circuit includes a first circuit element disposed in a first region overlapping the bonding portion in a plan view. The first circuit element is a passive element or a transistor, and θ<90° is satisfied, θ being an angle formed by the first surface and an inner side surface of the side wall.

Vibrator device

A vibrator device includes: a base having an integrated circuit disposed at a second surface; a vibration element; and a lid having an end surface of a side wall bonded to a first surface of the base at a bonding portion. The integrated circuit includes a first circuit and a second circuit, the first circuit includes a plurality of first circuit elements disposed in a first region ARA, and the second circuit includes a second circuit element disposed in a second region ARB. At this time, the following relations are established.

A resonator device includes: a base; a resonator element that includes a resonator substrate and an electrode; a conductive layer that is disposed on the base; a metal bump that is disposed between the conductive layer and the resonator element, and that electrically couples the conductive layer and the electrode while bonding the conductive layer and the resonator element; and at least one of a first low elastic modulus layer that is interposed between the base and the conductive layer, that overlaps the metal bump in a plan view of the base, and that has an elastic modulus smaller than that of the metal bump, and a second low elastic modulus layer that is interposed between the resonator substrate and the electrode, that overlaps the metal bump in the plan view of the base, and that has an elastic modulus smaller than that of the metal bump.

Resonator device

There is provided a vibrator device including: a vibrator element; a semiconductor substrate having a first surface on which the vibrator element is disposed and a second surface positioned on an opposite side of the first surface; a fractional N-PLL circuit disposed at the second surface; a wiring that is disposed at the first surface and electrically couples the vibrator element and the fractional N-PLL circuit; and an output terminal that is disposed at the second surface side of the semiconductor substrate, is electrically coupled to the fractional N-PLL circuit, and outputs a signal from the fractional N-PLL circuit, in which the output terminal does not overlap the wiring in a plan view along a thickness direction of the semiconductor substrate.

A resonator device includes a resonator element, a base which has a first surface and a second surface that are in front-back relation, and in which the resonator element is arranged at the first surface, an integrated circuit provided to the base, a lid which has an inner surface opposed to the resonator element, and an outer surface in a front-back relationship with the inner surface, and which is bonded to the base so as to house the resonator element, and a radiation layer which is arranged at the inner surface of the lid, and is higher in emissivity than the lid.

A vibrator device includes a base, a vibrator element attached to the base, and a lid housing the vibrator element between the base and itself and bonded to the base. The base has a semiconductor substrate including a first surface bonded to the lid and a second surface in a front-back relationship with the first surface, a first insulating layer placed on the first surface, first, second internal terminals placed on the first insulating layer and electrically coupled to the vibrator element, a second insulating layer placed on the second surface, and first, second external terminals placed on the second insulating layer and electrically coupled to the first, second internal terminals. The second insulating layer has a first external terminal region in which the first external terminal is placed and a second external terminal region separated from the first external terminal region, in which the second external terminal is placed.

Vibrator device, vibrator module, and electronic apparatus

A vibration device includes a base substrate made of silicon and having a first surface and a second surface facing away from the first surface, a lid bonded to the base substrate, a vibrator disposed at the first surface of the base substrate and accommodated in a space between the base substrate and the lid, and a thermistor element disposed at the base substrate.

Vibration device, electronic apparatus, and vehicle

A vibrator device includes an intermediate substrate that includes a frame having a first surface and a second surface opposite to the first surface and a vibration element and is formed of quartz crystal, a first substrate that is bonded to the first surface of the frame and is formed of the quartz crystal or glass, a second substrate that is bonded to the second surface of the frame and is formed of the quartz crystal or the glass, and a functional element that is disposed on the first substrate and includes a functional layer, in which the functional element includes a portion overlapping the vibration element in plan view.

Vibrator device, electronic apparatus, and vehicle

A vibration device has a substrate including a first surface and a second surface located on an opposite side to the first surface, a heater provided on the first surface side of the substrate, a temperature sensor provided on the first surface side of the substrate, a vibration element disposed on the first surface side of the substrate, a lid including a third surface joined on the first surface side and a fourth surface located on an opposite side to the third surface, and a circuit provided on one of the first surface, the second surface and the fourth surface, and including a temperature control circuit configured to control the heater based on an output of the temperature sensor.

Vibration device

A robot includes a movable part having a first internal space, a shock-absorbing section disposed outside the movable part, and having a second internal space, and a state switching section capable of switching between a first state of supplying a fluid from a fluid supply source to the first internal space and a second state of supplying the fluid from the fluid supply source to the second internal space. Further, the state switching section includes a first flow channel adapted to supply the fluid from the fluid supply source to the first internal space, a second flow channel adapted to supply the fluid from the fluid supply source to the second internal space, and a valve capable of adjusting opening/closing degrees of each of the first flow channel and the second flow channel.

Robot

A breath detection device includes a breath-blowing unit in which breath is blown; a deflection amount sensor that detects pressure of the breath-blowing unit; a temperature sensor that detects a physical amount (temperature) different from the pressure of the breath-blowing unit; a storage unit that stores a determination reference which is a reference to determine whether or not breath is blown into the breath-blowing unit; and a determination unit that compares a detection result which is detected by the deflection amount sensor and the temperature sensor with the determination reference, and determines whether or not breath is blown into the breath-blowing unit.

Breath detection device, mobile terminal and time display device

A physical quantity sensor includes a diaphragm which is able to be bent and deformed; and a bending amount element, provided in the diaphragm, which outputs a signal based on the amount of bending of the diaphragm. The bending amount element includes a center side element which is provided closer to the center of the diaphragm and an edge portion side element which is provided closer to an edge portion of the diaphragm than the center side element.

Physical quantity sensor, altimeter, electronic apparatus, and moving object

A physical quantity sensor includes a substrate that has a recess that is open toward one side of the substrate, a diaphragm that has a bottom of the recess as part of the diaphragm and undergoes bending deformation under pressure, a piezoresistance device that is disposed in the diaphragm, a coating layer that faces the diaphragm via a cavity, and wiring layers that are disposed between the substrate and the coating layer, and form, along with the substrate and the coating layer, the cavity. Each of the wiring layers contains a metal, and in a plan view, a circumferential edge of the bottom of the recess is closer to the center of the diaphragm than a substrate-side end of an inner wall surface of one of the wiring layers.

Growing community of inventors

Chino, Japan

Junichi Takeuchi