Average Co-Inventor Count = 6.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Other (1 from 832,680 patents)
2. Tokyo Electron Limited (1 from 10,295 patents)
1 patent:
1. 5698036 - Plasma processing apparatus