Average Co-Inventor Count = 4.80
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (2 from 10,346 patents)
2 patents:
1. 11367642 - Substrate processing apparatus and purging method
2. 10473399 - Connection structure, magnetic annealing device using same, and connecting method