Kawasaki Jukogyo Kabushiki Kaisha

Junichi Sato

Hiroyuki Okada

Ippei Shimizu

Takahiro Abe

Daisuke Yamanaka

A robot that transfers a substrate includes a hand, an arm, a substrate detector, and a substrate orientation examiner. The hand holds and transfers the substrate. The arm is connected to the hand and moves the hand. The substrate detector detects absence or presence of the substrate in a non-contact manner. The substrate orientation examiner examines an orientation of the substrate based on a height detected by the substrate detector at which the substrate is located when it is not held by the hand.

Robot and substrate orientation examination method

A robot includes a guide, a mover, a hand, a deformation acquirer, a orientation adjuster, and a controller. The mover is installed to the guide and movable in a direction that the guide guides along. The hand is installed to the mover and holds a substrate. The deformation acquirer acquires information on a deformation of the guide. The orientation adjuster adjusts an orientation of the hand according to the deformation of the guide acquired by the deformation acquirer. The controller controls operation of the orientation adjuster. The controller adjusts the orientation of the hand performing a holding operation on the substrate to be transferred by using the orientation adjuster based on the information on the deformation of the guide.

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Oshu, Japan

Junichi Sato