Mitsubishi Denki Kabushiki Kaisha

Mitsubishi Electric Corporation

Mitsubishi Denki K.k.

Seiko Epson Corporation

Rohm Co., Ltd.

Hamamatsu-photonics K.k.

Osaka University

Kyoto University

Junichi Nishimae

Tatsuya Yamamoto

Tatsuki Okamoto

Kenji Yoshizawa

Yukio Sato

Tomotaka Katsura

Hiroyuki Kawano

Tetsuo Kojima

Shuichi Fujikawa

Takashi Yamamoto

Daiji Morita

Masaki Kuzumoto

Masakazu Taki

Tetsuya Ogawa

Yushi Takenaka

Yoichi Tanino

Tomohiro Sasagawa

Masato Matsubara

Atsuhiro Sono

Akihiko Iwata

Hidetada Tokioka

Mitsuo Inoue

Kohei Teramoto

Akira Sekiguchi

Koji Yasui

Tomohiro Kyoto

Akihiro Otani

Kazuki Kuba

Susumu Konno

Nobutaka Kobayashi

Hiroaki Kurokawa

Yoshiyuki Goto

Yuzuru Tadokoro

Yukio Satou

Mitsutoshi Miyasaka

Susumu Noda

Masashi Yoshimura

Takatomo Sasaki

Naoki Miyamoto

Takashi Kumagai

Hiroyuki Murai

Shigenori Yagi

Kentaro Tanaka

Yusuke Mori

Masaaki Tanaka

Yoshihiro Ueda

Yoko Inoue

Akinori Nishio

Shinsuke Yura

Masato Kawasaki

Miki Kurosawa

Takuya Kawashima

Hiroaki Jiroku

Keisuke Namba

Masaki Seguchi

Naoyuki Nakamura

Kenji Kumamoto

Keisuke Furuta

Kazutoshi Morikawa

Yasuhiko Iwai

Kenji Saruta

Toshiyuki Hokodate

Masashi Naruse

Muneyuki Nishioka

Chisako Oda

Tadashi Yanagi

A laser amplification device includes a laser oscillator that includes a first laser active medium including a mixed gas containing carbon dioxide gas and emits pulsed laser light with the full width at half maximum of between 15 ns to 200 ns, and a laser amplifier that includes a second laser active medium including a mixed gas containing carbon dioxide gas through which the pulsed laser light emitted from the laser oscillator passes to be shortened to pulsed laser light with the full width at half maximum of between 5 ns and 30 ns to be output.

Laser amplification device and extreme ultraviolet light generation apparatus

A gas laser device includes a shielding plate that is a first shielding member, and a shielding plate that is a second shielding member. The first shielding member includes a first opening, and a second opening. A laser beam that is to be propagated to discharge regions passes through the first opening. The laser beam that has taken a round trip through the discharge regions after passing through the first opening passes through the second opening. The second shielding plate faces the first shielding member the discharge regions located therebetween. The shielding plate includes an opening that is a third opening. The laser beam that has been propagated through the first opening and the discharge regions, and the laser beam that is to be propagated to the second opening through the discharge regions pass through the third opening. A plane shape of the third opening includes a rectilinear segment.

Gas laser device

A wavelength combining laser apparatus includes: a semiconductor laser emitting laser beams in an optical-axial direction perpendicular to a laser beam combining direction; a wavelength combining element combining the laser beams in the laser beam combining direction into a single laser beam; a cross-coupling reduction optical system having positive power in the laser beam combining direction perpendicular to an optical axis of the single laser beam output from the wavelength combining element; and a partially-reflective mirror reflecting the single laser beam having passed through the cross-coupling reduction optical system and also allowing the single laser beam to transmit through and exit the partially-reflective mirror. The cross-coupling reduction optical system is disposed to image the light emitting end face on the partially-reflective mirror by causing the light emitting end face to be conjugate to the partially-reflective mirror in a plane formed by the optical axis and the laser beam combining direction.

Wavelength combining laser apparatus

A laser oscillator includes: an external resonator configured to include laser media to emit laser beams having different wavelengths; and a partially reflective mirror to transmit part of the laser beams and reflect and return a remainder toward the laser media. The external resonator includes therein: a diffraction grating to perform wavelength coupling on the laser beams having different wavelengths emitted from the laser media so as to superimpose the laser beams into one laser beam and to emit, to the partially reflective mirror, the one laser beam; and a prism that is placed between the laser media and the diffraction grating and that superimposes the laser beams into one laser beam on the diffraction grating, the prism including two surfaces forming an apex angle, one of the two surfaces being an incident surface and another of the two surfaces being an exit surface.

Laser oscillator

A laser oscillator includes: a plurality of laser media to emit laser beams having different wavelengths; a diffraction grating to emit, in a superimposed state, the laser beams incident from the laser media; a partially reflective element to reflect part of the laser beams emitted from the diffraction grating and return the part of the laser beams to the diffraction grating, and to transmit a remainder; and a plurality of lenses each disposed between a corresponding one of the laser media and the diffraction grating. The lenses are each disposed in an optical path formed between a corresponding one of the laser media and the diffraction grating, and the lenses superimpose the laser beams from the laser media on an incident surface of the diffraction grating such that the laser beams have an equal outer diameter.

A beam shaping device includes an SAC and an FAC. The SAC is placed between an LD bar and the FAC. A first incident surface and a first exit surface are formed in the SAC. The first incident surface includes a plurality of incident-side lens surfaces aligned in a slow axis direction X. The incident-side lens surfaces each have, in section orthogonal to a fast axis direction Y, a shape convexed toward the outside of the SAC and, in section orthogonal to the slow axis direction X, a shape concaved toward the inside of the SAC. The shape of the first incident surface and the shape of the first exit surface in section orthogonal to the slow axis direction X are concentric arcs having a point on an emission end surface of a light emitting layer as the center.

Beam shaping device and laser oscillator

A laser device causes, with a plurality of laser media that generate laser beams having wavelengths different from one another, a convergent lens to cause laser beams each emitted from the plurality of laser media to overlap one another on a dispersive element to form a single combined beam. The dispersive element is positioned where the plurality of laser beams are caused to overlap one another by the convergent lens to form a single beam, causes a portion of the plurality of laser beams to return back toward the laser media as a first laser beam flux, and outputs another portion of the plurality of laser beams as a second laser beam flux having a single optical axis.

Laser device

A laser module includes: a photonic crystal surface-emitting laser element; a collimating lens array for producing a parallel optical beam; a condenser lens for condensing the optical beam; and an optical fiber which receives the optical beam on one end and transmits the optical beam to the outside. In the collimating lens array, an aperture portion corresponding to a collimating lens allows passage of the optical beam with an energy of not less than 94.0% and not more than 99.5% with respect to 100% of the energy of the optical beam incident on the collimating lens array.

Laser module and laser processing apparatus

A gas laser device which can perform optical amplification, laser light passing through a laser gas excited by electrical discharge, including: a first and second pair of discharge electrodes arranged longitudinally along an optical axis of the laser light; at least two mirrors reflecting the laser light amplified by the gas laser, the mirrors arranged opposite to each other to interpose a first discharge region defined by the first pair of discharge electrodes and a second discharge region defined by the second pair of discharge electrodes therebetween; and a shielding member located between the first pair of discharge electrodes and the second pair of discharge electrodes, the shielding member protruding from electrode surfaces of the discharge electrodes toward the optical axis of the laser light. The configuration can efficiently suppress parasitic oscillation with a simple structure.

A laser processing device including: a laser oscillator; a processing table; a transmission optical system for transmitting laser light emitted from the laser oscillator to the processing table; a processing head for condensing and radiating the laser light transmitted via the transmission optical system to an object to be processed; a moving mechanism for changing a relative position between the object to be processed and the laser light to be radiated to the object to be processed; and a variable curvature spherical mirror. The transmission optical system includes a reflective beam expander mechanism for collimating and magnifying the laser light from the laser oscillator. The reflective beam expander mechanism includes a spherical mirror and a concave mirror having different curvatures in two orthogonal axes.

Laser processing device

A laser machining apparatus, including: a laser light source; a transparent member that is set on an optical path of a laser beam and transmits the laser beam; a contact type temperature difference sensor, set on a surface of the transparent member outside an irradiation range of the laser beam, for detecting a temperature difference between a surface of the transparent member, which is spaced apart from a center of the transparent member by a first distance, and another surface of the transparent member, which is spaced apart from the center of the transparent member by a second distance larger than the first distance; and a controller correcting a focal position based on the temperature difference detected by the contact type temperature difference sensor to stabilize a beam diameter of the laser beam condensed onto a machining object.

Laser machining device

A COlaser device and a COlaser processing device for emitting a pulse laser having a high output and a stable beam diameter without depending on a repetition frequency. The COlaser device includes: laser gas being a COlaser medium; a near-concentric stable optical resonator in which a radius of curvature of at least one resonator mirror is set so as to be equal to a distance from an optical switch to the resonator mirror; an optical switch provided in the stable optical resonator; and transmission mirrors provided so that laser light generated from the stable optical resonator passes through the COlaser medium again.

[object Object]

A laser oscillator includes: a optical resonator having an orthogonal mirror and a partial reflection mirror; a laser gas acting as a laser medium; and a 90-degree folding mirror acting as a polarization selecting element. The orthogonal mirror has two reflecting surfaces orthogonal to each other. The 90-degree folding mirror is arranged such that the polarization direction of the laser oscillated light is parallel to the reference axis set in a plane perpendicular to an optical axis of the optical resonator. The orthogonal mirror is arranged such that the polarization direction of the laser oscillated light is parallel to the valley line of the orthogonal mirror. This configuration can compensate anisotropy of optical characteristics in a laser medium, and stably generate linearly polarized laser light having excellent isotropy in a simple manner.

Gas discharge laser oscillator and gas discharge laser amplifier providing linearly polarized light

A COgas laser device according to the present invention amplifies COlaser light that oscillates repeatedly in short pulses having a pulse width of 100 ns or less, and cools a CO2 laser gas which is excited by continuous discharge by circulating the CO2 laser gas by means of forced convection. Therein, an angle &#x3b8; defined by the optical axis of the amplified COlaser beam and the flow direction of the COlaser gas caused by the forced convection is determined by both a discharge cross sectional area and a discharge length of a volume in which the COlaser gas is excited by discharge, whereby increasing the gain of pulsed laser to achieve pulsed laser light having an extremely high average output power.

A tri-axially orthogonal gas laser device in which an optical axis of an optical resonator, a direction in which a laser gas is supplied into the optical resonator, and a direction of discharge for exciting the laser gas are mutually orthogonal to one another, the device including: an exciting unit including a blower supplying the laser gas in &#x2212;X direction to the optical axis of the optical resonator, and a discharge electrode pair which is shifted on a gas upstream side with respect to the optical axis; and an exciting unit including a blower for supplying the laser gas in +X direction to the optical axis of the optical resonator, and a discharge electrode pair which is shifted on a gas upstream side with respect to the optical axis

Growing community of inventors

Tokyo, Japan

Junichi Nishimae