Riken Corporation

Junichi Kato

Shinya Morita

Hitoshi Ohmori

Yutaka Yamagata

Sei Moriyasu

An aspherical reference surface is manufactured with such a shape accuracy that an interference band appears according to the aspherical shape of a surface to be measured, an aspherical wave front is formed using the reference surface, and a large aspherical surface is measured from interference within a short time. The aspherical reference surface is an aspherical surface optical element manufactured by fly-cutting or ELID-grinding, that produces the interference band from light reflected from the aspherical surface and predetermined reference light, and thereby measures the shape of the aspherical surface from interference. The aspherical surface optical element should be an aspherical reflecting mirror with such a shape accuracy that an interference band is generated and parallel light is reflected in the direction normal to the surface to be measured. Thus, the shape can be measured in a short time without using an aspherical surface standard.

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Wako, Japan

Junichi Kato