Agc Inc.

Hitachi High-tech Corporation

Junichi Kakuta

Takashi Shibuya

Yuhei Gima

Risa Kimura

Hiroshi Sakamoto

Hiroki Kawada

Yuriko Kaida

Kei Sakai

Takahiro Kawasaki

Kosuke Takayama

Toshimasa Kameda

To prevent a light control device from being scarred. A laminated glasscomprises a pair of glass platesand, and

Laminated glass

Proposed is a technique that can detect a random noise component at high accuracy without measurement pattern limitation and enables edge roughness measurement at higher accuracy. According to this disclosure, pattern matching and edge position correction are performed with respect to each of the left edge and the right edge of a line pattern in an obtained line pattern image, and an image with no roughness is generated. A PSD value is measured from the image, and the average PSD value of all the frequencies is determined as a random noise component, so that the random noise component can be detected at high accuracy. Further, the PSD value (random noise component) is subtracted from the PSD value of an original image, thereby measuring edge roughness at high accuracy.

Pattern measurement system, pattern measurement method, and program for measuring edge roughness at the edge of a pattern based on a random noise component

To provide a laminated glass in which color shading of an optical member is reduced, and a method for producing it. A laminated glass comprising

Laminated glass, and method for manufacturing laminated glass

A pattern measuring method and a pattern measuring apparatus that efficiently prevent a measurement error inherent to a device that performs beam scanning in a specific direction such as a scanning electron microscope are provided. The invention is directed to a pattern measuring method and a pattern measuring apparatus in which a first curve with respect to an edge of one side and a second curve with respect to an edge of the other side are obtained by calculating a first power spectral density with respect to the edge of one side of a pattern and a second power spectral density with respect to the edge of the other side of the pattern based upon a signal that is obtained when a charged particle beam is scanned in a direction intersecting the edge of the pattern; a difference value between the first curve and the second curve is calculated; and one of the first curve and the second curve is corrected by using the difference value.

Pattern measuring method and pattern measuring apparatus

A method of producing an optical component includes a transfer step of sandwiching a molding material layer of a molding material between a thin glass plate and a mold and transferring an indented pattern on the mold to the molding material layer to form a patterned indented layer on the thin glass plate, and a separation step of separating the mold from the patterned indented layer. During the transfer step, a reinforcing plate is removably attached to the thin glass plate.

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Tokyo, Japan

Junichi Kakuta