Azbil Corporation

Yamatake Corporation

Junichi Isetani

Hiroyuki Inagaki

Hiroshi Hatakeyama

Shigeru Aoshima

A flow rate control device includes: a fuel gas supply channel having a flow rate adjusting valve; a thermal type mass flow rate sensor arranged in the supply channel; a calculation unit which calculates a thermal quantity flow rate of the fuel gas defined by a product of a volume flow rate of the fuel gas and a heat generation quantity per unit volume of the fuel gas according to an output from the thermal type sensor; and a flow rate control unit which controls the open degree of the flow rate adjusting valve according to a difference between a control target value for controlling the thermal quantity flow rate and the thermal quantity flow rate calculated by the calculation unit.

Flow rate control device

A fuel supply device for generating mixed gas in which air and/or oxygen are mixed into fuel gas and supplying the mixed gas to a burning appliance comprises a flow rate control module disposed in a supply path of the fuel gas and flow rate control modules disposed in supply paths of the air and/or the oxygen. The flow rate control module includes a thermal mass flow rate sensor, a first calculator for calculating the thermal flow rate of the fuel gas from the output of the thermal mass flow rate sensor, a control computing unit for controlling the flow rate of the fuel gas via a flow rate regulating valve according to the calculated thermal flow rate, a second calculator for calculating the calculated calorific value per unit volume of the fuel gas, and a computing unit for computing the ratio of the calculated calorific value to the reference calorific value per unit volume of the fuel gas in a reference state. The ratio is used for the control of the flow rates of the air and/or oxygen by the flow rate control modules.

Fuel supply device

An air suction passage (A,B) is provided with a pick and place confirming sensor () comprising a gas flow sensor. The pick and place confirming sensor () measures the flow rate of air sucked in from an air suction port () of a pick and place nozzle (). The presence or absence of a part lifted to the pick and place nozzle () is detected on the basis of the measurement result.

Growing community of inventors

Tokyo, Japan

Junichi Isetani