Mitsubishi Denki Kabushiki Kaisha

Ricoh Company, Ltd.

Olympus Medical Systems Corporation

Resonac Corporation

Ebara Environmental Plant Co., Ltd.

Junichi Ichikawa

Satoshi Onodera

Etsuo Nishimura

Seiki Kodama

Kei Matsuoka

Toshiyuki Umezawa

Akiko Yokoyama

Katsuhiko Ueda

Tomoyuki Kohida

Takahiro Kawachi

An acceleration sensor including: a fixed substrate; a fixed electrode mounted on the fixed substrate; a movable body, supported by the fixed substrate and displaced in response to an applied acceleration; a movable electrode which is arranged in the movable body in such a manner that the movable electrode faces the fixed electrode to form, together with the fixed electrode, a capacitor; wherein the movable electrode is mounted between grooves formed in the movable body. The acceleration sensor features improved mechanical strength, compact design and improved sensing accuracy while permitting the manufacturing process to be simplified.

Acceleration sensor and a method of producing same

A pressure sensor device prevents foreign matters from reaching a pressure sensor at the back of a pressure introducing passage, is superior in resistance against both fouling and freezing, and includes a temperature sensor. The pressure sensor device comprises a pressure sensor including a pressure detecting element is disposed to define an enclosed reference chamber and an enclosed pressure introducing chamber and is deformed depending on a pressure difference between the reference chamber and the pressure introducing chamber for detecting the pressure of an object to be measured, a pipe connected to the pressure introducing chamber, and a lead-out portion; a temperature sensor including a heat sensitive element for detecting the temperature of the measured object and a lead-out portion; and a sensor container containing the pressure sensor and the temperature sensor therein and including a pressure introducing passage formed therein which has one end air-tightly connected to the pipe and the other end being open to the exterior, and also has a labyrinth structure, the sensor container including a temperature sensor containing projection formed to accommodate the heat sensitive element embedded in its distal end portion.

Pressure sensor device

Disclosed is a pressure sensor device including a temperature sensor, which can reduce the number of places required for mounting necessary sensors and can simplify a structure. The pressure sensor device comprises a housing including a connector portion provided at an outer periphery thereof, molded integrally with a plurality of external terminals and disposed to cover the pressure sensor from above, and a resin-made base cooperating the housing to define a container space for containing a pressure sensor and a circuit board. The base includes a pressure introducing passage, a temperature sensor containing projection with the temperature sensor installed therein, work holes into which are inserted the other ends of some of the external terminals, and intermediate terminals fixed to said base and having one ends electrically connected to leads of the temperature sensor, the intermediate terminals being partly exposed in the work holes and electrically connected to the other ends of the external terminals inserted into the work holes.

Growing community of inventors

Tokyo, Japan

Junichi Ichikawa