Sony Corporation

Sony Semiconductor Solutions Corporation

National Cancer Center

Asahi Kasei Medical Co., Ltd.

Junichi Honda

Kazuo Takahashi

Teruo Inaguma

Seiji Kumagai

Koji Suzuki

Fusashige Tokutake

Takashi Tamura

Eiji Nakashio

Masatoshi Hayakawa

Manabu Aizawa

Yoshihiko Inoue

Norikatsu Fujisawa

Yoshito Ikeda

Shin Sasaki

Shigeto Watanabe

Atsushi Suzuki

Hiroshi Morita

Atsushi Ochiai

Tatsuo Kumura

Toru Matsunaga

Hideaki Ojima

Kyu Kanno

Akira Urai

Yuji Nakano

Mineo Yorizumi

Masahiro Kikkawa

Yoshitomo Ito

Mikitomo Yasutake

Tadashi Sakurai

Kasumi Ninomiya

Chisako Yamauchi

Tetsuya Shibayama

Miho Suzuki

A gyro sensor having increased sensitivity is provided, along with an electronic apparatus including the gyro sensor. The gyro sensor includes: a vibrator; a first piezoelectric layer, and a second piezoelectric layer. The first piezoelectric layer, which includes a first electrode pair and a first piezoelectric film arranged between the first electrode pair, is arranged on a front surface of the vibrator and is capable of causing the vibrator to vibrate in a first axis direction vertical to the front surface. The second piezoelectric layer, which includes a second electrode pair and a second piezoelectric film arranged between the second electrode pair, is arranged on the first piezoelectric layer and is capable of causing the vibrator to vibrate in the first axis direction. The second piezoelectric layer functions synchronously with the first piezoelectric layer to cause the vibrator to vibrate in the first axis direction.

Gyro sensor and electronic apparatus

An angular velocity sensor includes: a frame including a pair of first beams extending in a first direction and opposed to each other in a second direction orthogonal to the first direction, a pair of second beams extending in the second direction and opposed to each other in the first direction, and connections between those pairs; a drive unit that vibrates the frame in a first plane, to which the first and second directions belong, in a vibration mode in which when one pair of those pairs move closer to each other, the other move away from each other, and vice versa; a first detector that detects, based on the amount of deformation of the frame in the first plane, an angular velocity around an axis of a third direction orthogonal to the first plane; and a support mechanism including a base portion and joint portions.

Angular velocity sensor

An angular velocity sensor includes an annular frame, a drive part, and a detection part. The frame has first beams and second beams. The first beams extend in an a-axis direction and are opposed to each other in a b-axis direction orthogonal to the a-axis direction. The second beams extend in the b-axis direction and are opposed to each other in the a-axis direction. The drive part causes the frame to oscillate within an XY plane to which the a-axis and the b-axis belong, in an oscillation mode where, when one of the first and second beams come closer to each other, the other separates from each other. The detection part detects an angular velocity around an axis in the Z-axis direction orthogonal to the XY plane, based on an amount of deformation of the frame oscillating in the oscillation mode within the XY plane.

Angular velocity sensor, electronic apparatus, and method of detecting an angular velocity

It is an object of the present invention to provide a novel method for decreasing the number of clinical cases for which trastuzumab administration is ineffective. The present invention provides a method for treating a living individual with epithelial cancer comprising: step (a) of selectively reducing KLRG1-positive immunocytes in the peripheral blood of a living individual with epithelial cancer ex vivo, which is positive for a cancer-specific membrane antigen expressed in epithelial cancer cells and positive for a KLRG1 ligand; and step (b) of administering, to the living individual, a therapeutic agent for cancer comprising an antibody reacting with the cancer-specific membrane antigen expressed in epithelial cancer cells and having antibody-dependent cell cytotoxicity.

Treatment method for epithelial cancerous organism

Disclosed is an angular velocity sensor. The angular velocity sensor includes a first layer, a piezoelectric layer, and a second layer. The first layer has a first main surface and a second main surface, and includes a vibrator portion and a base portion that supports the vibrator portion. The piezoelectric layer is formed on the first main surface of the first layer. The second layer is integrally bonded to the base portion on a side of the second main surface of the first layer.

Angular velocity sensor and method of manufacturing the same

A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and a vibrating element mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a plurality of terminals, and a vibrator part integrally projected in a cantilever manner from one of the sides of the base part and having a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer, which are formed on the substrate-facing surface in that order. Furthermore, a reinforcing part is formed at the base end of the vibrator part so that the sectional area of the vibrator part gradually increases toward the base part.

Vibrating gyrosensor and vibrating element

A vibrating gyrosensor includes a support substrate on which a wiring pattern having lands is formed. A vibrating element is mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a number of terminals connectable to the lands is formed. A vibrator part integrally projects from a side of the base part and has a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer which are laminated on the substrate-facing surface. The vibrator part vibrates when an AC signal is applied between the first and second electrode layers. The central electric field strength of the AC signal is set at a position shifting to the positive direction from the center of a hysteresis loop of the piezoelectric layer.

Vibrating gyrosensor driven with offset potential

An angular velocity sensor includes a base portion, three arm portions that extend as one piece from the base portion to an approximately same direction, a piezoelectric film formed on one surface of each of the arm portions, drive electrodes for excitation formed on the piezoelectric films of at least two outer arm portions, and detection electrodes for angular velocity detection formed on the piezoelectric film of at least a center arm portion. Among the three arm portions, the two outer arm portions are excited in phase, and the center arm portion is excited in opposite phase with the two outer arm portions. The drive electrodes excite the arm portions in a first direction vertical to surfaces on which the piezoelectric films are formed. The detection electrodes detect a vibration in a second direction parallel to the surfaces on which the piezoelectric films of the arm portions are formed.

Angular velocity sensor and electronic device

To improve characteristics by achieving size reduction and high Q value with a simple structure. A vibratory gyrosensoraccording to the present invention includes a supporting substrate, which has a circuit element mounted thereon and a wiring pattern having a plurality of landsdisposed thereon; and a vibration elementmounted on a surface-of the supporting substrate. The vibration elementincludes a base portionhaving a mounting surface-provided with a plurality of terminalsthat are connected to the lands; and a vibrator portionextending integrally from a side of the base portionin a cantilever manner and having a substrate-facing surface which is flush with the mounting surface of the base portion, the substrate-facing surface being provided with a first electrode layer, a piezoelectric layerstacked on the first electrode layer, and a second electrode layerstacked on the piezoelectric layer. The vibration elementis mounted on the supporting substrateby joining the terminalsto the landswith metallic projectionsdisposed therebetween.

Vibratory gyrosensor having a vibration element provided with terminals

There is a need for a piezoelectric element capable of improving a productivity and a yield without impairing the piezoelectric characteristic and a method for manufacturing the same. A piezoelectric element is provided with a substrate, a first electrode film disposed on the substrate, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film. The piezoelectric film has a laminated structure composed of a plurality of crystallized piezoelectric thin films. The piezoelectric film having a predetermined thickness is formed by repeated cycles of a film formation step of forming a piezoelectric thin film and a crystallization heat treatment step of heat-treating the piezoelectric thin film to effect crystallization. In this manner, a piezoelectric film exhibiting uniform crystallinity in the film thickness direction may be produced.

Piezoelectric element and method for manufacturing piezoelectric element

A drive electrode to which a voltage for allowing a vibrator to vibrate is applied and first and second detection electrodes extending in the longitudinal direction of the vibrator in parallel to each other are formed as the upper electrode such that the drive electrode is interposed between the first and second detection electrodes and does not contact with the detection electrodes. In the case where there is a difference between the detection signals detected in the first and second detection electrodes when a voltage is applied between the lower electrode and drive electrode to allow the vibrator to vibrate at a vertical resonance frequency, a laser light is irradiated to a desired portion of the vibrator to apply grinding operation based on detection signals detected in the first and second detection electrodes, thereby adjusting the shape of the vibrator.

Vibration gyro sensor element with cantilever vibrator extending from substrate and positioned within opening in substrate

A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and vibrating elements mounted on a surface of the support substrate, wherein at least two vibrating elements are mounted on the support substrate, for detecting vibrations in different axial directions.

Vibrating gyrosensor

Method of manufacturing vibration gyro sensor element, vibration gyro sensor element, and method of adjusting vibration direction

Disclosed is a small-sized vibration type gyrosensor device of high sensitivity provided with a cantilevered oscillator. A cantilevered oscillator, provided with a lower electrode, a piezoelectric film and an upper electrode, formed on a single-crystal silicon substrate by a thin film forming process, includes, as an upper electrode, a driving electrode, formed along the length of the oscillatorfor applying the voltage for causing oscillations of the oscillator, and first and second detection electrodes, formed on both sides of the driving electrodeparallel to the longitudinal direction of the oscillator, without contacting with the driving electrode. With a width Wof the driving electrode, a width Wof the first detection electrode, a width Wof the second detection electrodeand with W=WWW, the condition of 0.5&#x3c;(W/W)&#x3c;1 is to be met.

Growing community of inventors

Miyagi, Japan

Junichi Honda