Ebara Corporation

Velbon International Corporation

Nippon Paper Industries Co., Ltd.

Hainan Litree Purifying Tech Co., Ltd.

Junichi Hayakawa

Tetsuo Komai

Shigeru Yoshikawa

Nobuharu Noji

Hiroshi Aono

Akihito Ogino

Yoichi Mori

Minoru Yada

Shunji Sekiguchi

Yasuaki Matsumori

Yuu Takata

Motoyasu Sato

Hiroshi Kohama

Kenichi Futami

Daichi Sakashita

Yoshihide Kaiya

Masazumi Oba

Lianggang Chen

Qing Chen

Kazutaka Nakagawa

A sealing system includes: a double mechanical seal having a pump-side sealing mechanism () and an atmospheric-side sealing mechanism (); a pump mechanism () driven by a rotational shaft (); a first medium circulation line () for circulating a fluid barrier-and-cooling medium between a first chamber () and a second chamber (), the first medium circulation line () being coupled to the first chamber () and the second chamber (), the fluid barrier-and-cooling medium being different from a fluid handled by the centrifugal pump; a heat exchanger () and a shut-off valve () attached to the first medium circulation line (); a second medium circulation line () bypassing the shut-off valve (); and a medium pressurizing pump () and an on-off valve () attached to the second medium circulation line ().

Sealing system

A sealing system includes: a double mechanical seal having a pump-side sealing mechanism () and an atmospheric-side sealing mechanism (); a pump mechanism () driven by a rotational shaft (); a first medium circulation line () for circulating a fluid barrier-and-cooling medium between a first chamber (a) and a second chamber (b), the first medium circulation line () being coupled to the first chamber (a) and the second chamber (b), the fluid barrier-and-cooling medium being different from a fluid handled by the centrifugal pump; a heat exchanger () and a shut-off valve () attached to the first medium circulation line (); a second medium circulation line () bypassing the shut-off valve (); and a medium pressurizing pump () and an on-off valve () attached to the second medium circulation line ().

The present invention aims to provide a resin having an excellent solubility to alcohols, an excellent adherability to nonpolar base materials such as polyolefin, and not containing chlorine; and to provide a resin composition containing a urethane resin, not having the elimination problem of hydrochloric acid caused by external factors, having a good compatibility with a variety of components containing urethane resins, and having a good adherability to a variety of base materials, so that the resin composition can suitably be used as an ink, an adhesive, and paint. The present invention provides a block copolymer comprising a polymer block (A) mainly comprising olefin monomers and a polymer block (B) comprising vinyl monomers having hydroxy groups and other vinyl monomers copolymerizable with the vinyl monomers having hydroxy groups, in which a hydroxy value is within a range of 5 mg KOH/g to 120 mg KOH/g; a dispersion thereof; a resin composition containing the block copolymer and a urethane resin; and uses thereof.

Block copolymer and resin composition

A thermosensitive recording label is provided having a thermosensitive recording layer and a tackifier layer installed sequentially on a transparent film substrate. The thermosensitive recording label has excellent water and weather resistance.

Thermosensitive recording label

There is provided a hollow fiber membrane module () comprising: a membrane bundle () of a plurality of hollow fiber membranes (); a cylindrical body () housing the membrane bundle (); a fixing portion () in which at least one end of the membrane bundle () is fixed to the cylindrical body (); and a raw water outflow nozzle () for allowing raw water to flow out from the vicinity of the fixing portion (). Raw water supplied into the cylindrical body () is allowed to permeate from the outside into the inside of each hollow fiber membrane (). A soft potting portion () has, in its surface to be in contact with raw water, at least one groove ().

Hollow fiber membrane module

The present invention aims to provide a process and an apparatus for recovering a PFC gas, which can readily bring cooling traps to a cryogenic temperature with a low-capacity refrigerator and can recover a high-purity PFC gas by applying deep freeze separation without the need for a multistage fractionator. To achieve this object, the present invention relates to an apparatus for recovering a PFC gas from a mixed gas containing the PFC gas discharged from a vacuum processing chamber (etching chamber), comprising a cooling trap connected to the exhaust system of the vacuum processing chamber and adapted to freeze and collect a mixed gas discharged from said vacuum processing chamber, a non-PFC gas removal system for removing gases other than the PFC gas from the regenerated mixed gas emitted by vaporization of said frozen and collected gas after the operation of said cooling trap is stopped, and a recovery means for recovering a high-concentration PFC gas freed of gases other than the PFC gas in said non-PFC gas removal system, as well as a process therefor.

PFC gas recovery process and apparatus

A cryopump is provided with a detecting means for detecting an operation parameter at an elapsed operation time in a current operation cycle of the cryopump, a storing means for storing a value of another operation parameter in a past operation cycle of the cryopump as a management parameter, an arithmetic controlling means for calculating a succeeding rotational speed of the expander motor based on the current operational parameter and the management parameter stored in the storing means and outputting the same as a driving instruction signal, with which the succeeding rotational speed of the expander motor is controlled so as to maintain a temperature of a cryopanel or a pressure in a vacuum chamber to which the cryopump is attached at a predetermined value by using the operation parameter at the elapsed operation time in the current operation cycle of the cryopump detected by the detecting means and the operation parameter at the corresponding elapsed operation time in the past operation cycle of the cryopump stored in the storing means as the management parameter, and an expander motor driving means for driving the expander motor according to the driving instruction signal output from the arithmetic controlling means, whereby the cryopump may be operated stably even if a temporal load change has occurred.

Cryopump

Combined tripod leg and leg locks

An improved tripod includes a spike and pad structure for supporting the tripod on the ground. The spike is fixed to the bottom portion of the leg and at an angle with respect thereto and is threaded to receive a spherical ball. Gripping the ball is a pad element, the ball including a groove and the pad including a nubbin received in the groove. Thus, the pad is free to tilt arcuately with respect to the spike and when rotated, the pad also rotates the ball thus allowing the pad to extend beyond the spike or to position the spike within the pad.

Leg pad and spike for tripod

A leg locking device for a telescopically extensible leg of a tripod support which prevents deformation of an inner leg section so as to provide secure, long-lasting engagement of the locking device. Each telescopically extensible leg of the tripod supports includes at least one pair of outer and inner tubular leg sections telescopically slidable one within the other, wherein each tubular leg section has a six-sided polygonal cross-section. A leg locking device associated with each telescopically extensible leg has a locking lever mounted on the outer leg section for pivotal movement transverse to the longitudinal axis of the telescopically extensible leg. In the locking position, an eccentric cam element on the locking lever engages an angled wall of the inner leg section, so as to apply a locking force diagonally across the cross-section of the inner leg section, and thus urge the diagonally opposite corner of the inner leg section into frictional engagement with the corresponding corner of the outer leg section.

Growing community of inventors

Tokyo, Japan

Junichi Hayakawa