Globalwafers Co., Ltd.

JunHwan Ji

Carissima Marie Hudson

JaeWoo Ryu

WooJin Yoon

Richard Joseph Phillips

UiSung Jung

YoungJung Lee

WonJin Choi

JungHan Kim

ChanRae Cho

Methods for producing a silicon ingot in which a horizontal magnetic field is generated are disclosed. The magnet position is controlled in at least two stages of ingot growth. The magnetic poles may be at a first position during the first stage of ingot growth and lowered to a second position in a second stage of ingot growth. By controlling the magnet position, the crystal-melt interface shape may be relatively more consistent.

Axial positioning of magnetic poles while producing a silicon ingot

Ingot puller apparatus that axially position magnetic poles

A method for producing a silicon ingot by the horizontal magnetic field Czochralski method includes rotating a crucible containing a silicon melt, applying a horizontal magnetic field to the crucible, contacting the silicon melt with a seed crystal, and withdrawing the seed crystal from the silicon melt while rotating the crucible to form a silicon ingot. The crucible has a wettable surface with a cristobalite layer formed thereon.

Systems and methods for production of silicon using a horizontal magnetic field

Methods for producing monocrystalline silicon ingots by horizontal magnetic field Czochralski are disclosed. During growth of the neck and/or growth of at least a portion of the crown, a magnetic field is not applied to the neck and/or crown or a relatively weak magnetic field of 1500 gauss or less is applied. A horizontal magnetic field (e.g., greater than 1500 gauss) is applied during growth of the ingot main body.

Methods for producing a monocrystalline ingot by horizontal magnetic field Czochralski

A method is disclosed for reducing the size and density of defects in a single crystal silicon wafer. The method involves subjected a single crystal silicon ingot to an anneal prior to wafer slicing.

Method of treating a single crystal silicon ingot to improve the LLS ring/core pattern

Growing community of inventors

Cheonan, South Korea

JunHwan Ji