Beijing Rslaser Opto-electronics Technology Co., Ltd.

Junhong Yang

Qin Qiong Zhang

Xiang Wang

Hua Zhang

Rui Jiang

Xiaoquan Han

Zebin Feng

Mi Liao

A control method for stabilizing excimer laser pulse energy includes: obtaining a measured energy value of the n-th pulse in a pulse sequence; calculating the difference between the measured energy value and the preset energy value; taking the z-th pulse of the sequence as a demarcation point, when n is a positive integer less than z, the discharge voltage value of the next pulse is calculated according to a first mathematical model, and when n is an integer greater than z−1, the discharge voltage value of the next pulse is calculated according to a second mathematical model; and the next pulse is generated according to the discharge voltage value. A control system based on the control method includes: a high-voltage discharge module, a laser cavity, a laser parameter measurement module, and an energy stability controller.

Control method and system for stabilizing excimer laser pulse energy

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Beijing, China

Junhong Yang