International Business Machines Corporation

Samsung Electronics Co., Ltd.

Junghyuk Lee

Jeong-Heon Park

Anthony J Annunziata

Deborah A Neumayer

Guohan Hu

Eugene John O'Sullivan

Nathan P Marchack

Gen Pei Lauer

Younghyun Kim

Marinus Hopstaken

Yoonjong Song

Chandrasekara Kothandaraman

Kwangseok Kim

Boyoung Seo

Luqiao Liu

Kangho Lee

Chandrasekaran Kothandaraman

A magnetic memory device includes a plurality of first bit lines and a plurality of second bit lines, a plurality of first source lines respectively corresponding to the plurality of first bit lines and a plurality of second source lines respectively corresponding to the plurality of second bit lines, a plurality of first memory cells connected between the plurality of first bit lines and the plurality of first source lines, respectively, in a first region, the plurality of first memory cells respectively including a first memory device and a first selection transistor, and a plurality of second memory cells connected between the plurality of second bit lines and the plurality of second source lines, respectively, in a second region, the plurality of second memory cells respectively including a second memory device and a second selection transistor.

Magnetic memory device

Techniques relate to forming a semiconductor device. A magnetic pinned layer is formed adjacent to a tunnel barrier layer. A magnetic free layer is formed adjacent to the tunnel barrier layer, such that the tunnel barrier layer is sandwiched between the magnetic pinned layer and the magnetic free layer. The magnetic free layer includes a first magnetic layer, a second magnetic layer disposed on top of the first magnetic layer, and a third magnetic layer disposed on top of the second magnetic layer. The second magnetic layer of the magnetic free layer includes an additional material, and the additional material is a selection of at least one of Be, Mg, Al, Ca, B, C, Si, V, Cr, Ti, and Mn.

Light element doped low magnetic moment material spin torque transfer MRAM

Techniques relate to forming a magnetic tunnel junction (MTJ). A magnetic reference layer is formed adjacent to a tunnel barrier layer. The magnetic reference layer includes a pinned layer, a spacer layer adjacent to the pinned layer, and a polarizing enhancement layer adjacent to the spacer layer. A magnetic free layer is formed adjacent to the tunnel barrier layer so as to be opposite the magnetic reference layer.

High temperature endurable MTJ stack

Embodiments are directed to an electromagnetic memory device having a memory cell and an encapsulation layer formed over the memory cell. The memory cell may include a magnetic tunnel junction (MTJ), and the encapsulation layer may be formed from a layer of hydrogenated amorphous silicon. Amorphous silicon improves the coercivity of the MTJ but by itself is conductive. Adding hydrogen to amorphous silicon passivates dangling bonds of the amorphous silicon, thereby reducing the ability of the resulting hydrogenated amorphous silicon layer to provide a parasitic current path to the MTJ. The hydrogenated amorphous silicon layer may be formed using a plasma-enhanced chemical vapor deposition, which can be tuned to enable a hydrogen level of approximately 10 to approximately 20 percent. By keeping subsequent processing operations at or below about 400 Celsius, the resulting layer of hydrogenated amorphous silicon can maintain its hydrogen level of approximately 10 to 20 percent.

Magnetic tunnel junction encapsulation using hydrogenated amorphous semiconductor material

A method of making a magnetic random access memory (MRAM) device comprising forming a magnetic tunnel junction on an electrode, the magnetic tunnel junction comprising a first reference layer, a free layer, and a first tunnel barrier layer; and depositing an encapsulating silicon nitride film on and along sidewalls of the magnetic tunnel junction; wherein the silicon nitride film has a N:Si ratio from 0.1 to 1. An MRAM device made by the above method is also disclosed.

Low degradation MRAM encapsulation process using silicon-rich silicon nitride film

Growing community of inventors

Seoul, South Korea

Junghyuk Lee