Samsung Electronics Co., Ltd.

Seoul National University

Industry-University Cooperation Foundation Hanyang University

Snu Rdb Foundation

Jung-Pyo Hong

Jong-Woo Sun

Kwang-Nam Kim

Sang-Rok Oh

Jong-In Hong

Jeongryul Kim

Seong-Hoon Lee

Sung-Wook Jung

Jung-Mo Sung

Hae-Joong Park

Myoung-chul Um

Nam-Young Cho

Byeong-Hee Kim

Hyung-Jun Kim

Seonghoon Lee

Yong-Moon Jang

Sang-Dong Kwon

Sung-Yeon Kim

Sung-Il Kim

A semiconductor manufacturing apparatus includes a loadlock module including a loadlock chamber in which a substrate container is received, wherein the loadlock module is configured to switch an internal pressure of the loadlock chamber between atmospheric pressure and a vacuum; and a transfer module configured to transfer a substrate between the substrate container received in the loadlock chamber and a process module for performing a semiconductor manufacturing process on the substrate, wherein the loadlock module includes a purge gas supply unit configured to supply a purge gas into the substrate container through a gas supply line connected to the substrate container; and an exhaust unit configured to discharge a gas in the substrate container through an exhaust line connected to the substrate container.

Loadlock module and semiconductor manufacturing apparatus including the same

A plasma processing apparatus includes a process chamber having an inner space, an electrostatic chuck in the process chamber and to which a substrate is mounted, a gas injection unit to inject a process gas into the process chamber at a side of the process chamber, a plasma applying unit to transform the process gas injected into the process chamber into plasma, and a plasma adjusting unit disposed around the electrostatic chuck and operative to adjust the density of the plasma across the substrate.

Plasma processing apparatus and method of manufacturing semiconductor device using the same

A substrate support apparatus includes a substrate stage to support a substrate, and a ground ring assembly along a circumference of the substrate stage, the ground ring assembly including a ground ring body, the ground ring body having a plurality of recesses along a circumferential portion thereof, and a plurality of ground blocks movable to be received into respective recesses of the plurality of recesses, the plurality of ground blocks including a conductive material to be electrically grounded.

Substrate support apparatus and plasma processing apparatus having the same

Provided are substrate processing apparatuses including a temperature measurement unit. The substrate processing apparatus comprises a chamber including a substrate processing region, a dielectric sheet that is disposed on the substrate processing region and includes an insertion hole and a temperature measurement unit that is disposed on the dielectric sheet to measure the temperature of the dielectric sheet, and has a screw portion inserted into the insertion hole, wherein each of the insertion hole and the screw portion has thread helixes meshed with each other.

Substrate processing apparatus

A spoke type permanent magnet motor according to the present invention includes a stator having a stator slot radially disposed according to the center thereof and a stator core radially formed between the stator slots; a spoke type rotor, provided inside or outside the stator, having a rotor core radially disposed in the same direction as the stator slot and stator core and a permanent magnet radially disposed between the rotor core; a first fastening member, made of non-magnetic material, provided at the top and bottom of the rotor, respectively, in the height direction of the rotor; and a second fastening member, made of non-magnetic material, provided to penetrate the rotor core and first fastening member, thereby to maintain high output density and to easily implement miniaturization.

Spoke type permanent magnet motor capable of minimizing leakage of magnetic flux

An organic nanofiber including a gelled organic semiconductor compound. Also disclosed is an organic semiconductor transistor and a method of manufacturing an organic semiconductor transistor.

Organic nanofiber structure based on self-assembled organogel, organic nanofiber transistor using the same, and method of manufacturing the organic nanofiber transistor

An active region or channel for printed, organic or plastic electronics or polymer semiconductors, such as organic field-effect transistors (OFETs), is obtained by using an enhanced inkjet drop-cast printing technique. A two-liquid system is employed to achieve the direct growth of well-oriented organic crystals at the active region of channel. High-performance electrical properties exhibiting high carrier mobility and low threshold voltage are obtained due to the proper orientation of molecules in the grown crystal in a highest mobility direction, due to the absence of grain boundaries, and due to low trap densities. The hydrophobic-hydrophilic interactions between the liquids utilized, which results in the fabrication of low-cost and mass-producible printable electronic devices for applications in flexible displays, electronic signages, photovoltaic panels, membrane keyboards, radio frequency identification tags (RFIDs), electronic sensors, and integrated electronic circuits.

Forming active channel regions using enhanced drop-cast printing

Growing community of inventors

Seoul, South Korea

Jung-Pyo Hong