Samsung Electronics Co., Ltd.

Eugene Technology Co., Ltd.

Jung-Ki Min

Yong-Ki Kim

Young-goun Lee

Jong-gun Lee

Jun-Jin Hyon

Joo-Hyun Cho

Chul-Goo Kang

Hyun-ju Jung

Provided is a method for multi-supplying gas, the method comprising: installing a control valve and an flow meter on each of a plurality of branch lines branched from a main supply line, in which one or more gases are supplied, and supplying the gas; and providing the gas by adjusting flow of the gas by a controller connected to each of the control valve and the flow meter, wherein the controller has a first control manner, which controls each of the control valves based on a rate of flow measured by the flow meter to required portion flow for each branch line, and the first control manner adjusts an open rate of the control valve if the rate of the measured flow to the required portion flow is not within a predetermined range, and a unit of adjusting the control valve increases or decreases according to a difference between the measured flow and the required portion flow.

Multiple gases providing method and multiple gases providing apparatus

A specimen inspection apparatus into which a specimen transporting apparatus is inserted, the specimen inspection apparatus including: a platform including an upper plate and a lower plate disposed to face each other and to be spaced apart from each other by a predetermined distance; an injection part provided in the upper plate, a front end of the specimen transporting apparatus being inserted into the injection part; an introduction part connected to the injection part and provided between the upper and lower plate; and a plurality of stepped parts provided in the introduction part.

Specimen inspection apparatus

Growing community of inventors

Yongin-si, South Korea

Jung-Ki Min