Massachusetts Institute of Technology

Asml Holding N.v.

Silicon Valley Group, Inc.

Jung-Hoon Chun

Nannaji Saka

Richard C Lanza

Christian H Passow

Sangjun Han

Won Sik Kim

Edmond R Ward

Trevor Alan Hatton

Robert Parkash Mandal

Emir Gurer

Bernhardt Levy Trout

Allan Stuart Myerson

Gregory C Rutledge

Yi Du

Tom Zhong

John W Lewellen

Donald R Sauer

James C Grambow

Ted C Bettes

Salvatore Mascia

Nikhil Padhye

Keith M Forward

Edward C Lee

Emily Chang

Himanshu Hemant Dhamankar

Blair Kathryn Brettmann

Thor Eusner

James M B Evans

Ryan Richard Slaughter

James Derksen

Mao Wang

Manish H Bhatia

James Mb Evans

Layer processing for pharmaceuticals, and related systems, methods, and articles are generally described. In some embodiments, ingestible pharmaceutical products (e.g., tablets) can be formed by processing one or more layers containing a pharmaceutically active composition. For example, at least one layer containing a pharmaceutically active composition can be manipulated (e.g., folded, rolled, stacked, etc.) such that the average thickness of the product formed by the manipulation is at least about two times the average thickness of the portions of the layer(s) used to form the product. In some embodiments, after the layer is manipulated, it can be processed (e.g., cut, coated, etc.) to form a final product such as, for example, a tablet.

Layer processing for pharmaceuticals

Polishing pad conditioning system. The system includes a first rotatable platen supporting a polishing pad containing asperities having a radius of curvature. A second rotatable platen supports a disk of bulk material having holes therethrough, the second rotatable platen supported for translation as well as rotation. Means are provided for pushing the polishing pad and bulk material into contact at an interface during rotation and translation and means are provided for passing a slurry through the holes in the bulk material to the interface whereby the radius of curvature of the pad asperities is increased. Water may be delivered to the bulk material for cooling. A process for conditioning a polishing pad is also disclosed.

Chemical-mechanical polishing pad conditioning system

A method of and an apparatus for coating a substrate with a polymer solution to produce a film of uniform thickness, includes mounting the substrate inside an enclosed housing and passing a control gas, which may be a solvent vapor-bearing gas into the housing through an inlet. The polymer solution is deposited onto the surface of the substrate in the housing and the substrate is then spun. The control gas and any solvent vapor and particulate contaminants suspended in the control gas are exhausted from the housing through an outlet and the solvent vapor concentration is controlled by controlling the temperature of the housing and the solvent from which the solvent vapor-bearing gas is produced. Instead the concentration can be controlled by mixing gases having different solvent concentrations. The humidity of the gas may also be controlled.

Method of uniformly coating a substrate

An improved method and apparatus for coating semiconductor substrates with organic photoresist polymers by extruding a ribbon of photoresist in a spiral pattern which covers the entire top surface of the wafer. The invention provides a more uniform photoresist layer and is much more efficient than are current methods in the use of expensive photoresist solutions. A wafer is mounted on a chuck, aligned horizontally and oriented upward. An extrusion head is positioned adjacent to the outer edge of the wafer and above the top surface of the wafer with an extrusion slot aligned radially with respect to the wafer. The wafer is rotated and the extrusion head moved radially toward the center of the wafer while photoresist is extruded out the extrusion slot. The rotation rate of the wafer and the radial speed of the extrusion head are controlled so that the tangential velocity of the extrusion head with respect to the rotating wafer is a constant.

High efficiency photoresist coating

A liquid metal/solid metal interface detecting device comprises in general a radiation source for generating gamma radiation, which is directed to pass through a strand extruded from a continuous casting mold. A detector detects the gamma radiation passing through the partially solidified strand to determine a spatial profile for a liquid metal/solid metal interface by relying on the different gamma radiation attenuation characteristics of the solid metal and the liquid metal. Preferably, the gamma radiation is at energies of greater than one million electron volts. In some embodiments, a movable support carries the radiation source and the detector and moves the radiation source and detector along and around the ingot enabling generation of a three-dimensional profile of the liquid metal/solid metal interface by utilizing tomographic imaging techniques. Alternatively, solidification at a single region is determined and this information is used to control the formation of the strand in process controller implementations. Surface temperature detectors can also be used to provide more information about the solidification.

Solid/liquid interface detection in casting processes by gamma-ray

A liquid metal/solid metal interface detecting device comprises in general a radiation source for generating gamma radiation, which is directed to pass through a strand extruded from a continuous casting mold. A detector detects the gamma radiation passing through the partially solidified strand to determine a spatial profile for a liquid metal/solid metal interface by relying on the different gamma radiation attenuation characteristics of the solid metal and the liquid metal. Preferably, the gamma radiation is at energies of greater than one million electron volts. In some embodiments, a movable support carries the radiation source and the detector and moves the radiation source and detector along and around the ingot enabling generation of a three-dimensional profile of the liquid metal/solid metal interface by utilizing tomographic imaging techniques. Alternatively, solidification at a single region is determined and this information is used to control the formation of the strand in process controller implementations.

Solid/liquid interface detection in continuous casting processes by .gamma.

An apparatus for coating the surface of a substrate with a coating material, which apparatus includes a chamber into which the material is supplied in a pressurized molten state from a source thereof. The molten material is subjected to vibrations within the chamber and is forced out of the chamber through one or more orifices so that the vibration breaks up the molten material exiting from the orifices into uniform sized droplets. A charging plate places a charge on each of the droplets and supplies the charged droplets via one or more corresponding orifices in the charging plate for use in coating the substrate. The charging of the droplets maintains the uniform size of the droplets as they are applied to the substrate. The droplets are further maintained in an oxygen-free atmosphere as they pass from the chamber to and through the charging plate. Each of the components of the apparatus is made as a separate module so that the overall apparatus can be readily assembled and disassembled.

Apparatus for applying uniform metal coatings

A process for producing charged uniformly sized metal droplets in which a quantity of metal is placed in a container and liquified, the container having a plurality of orifices to permit passage of the liquified metal therethrough. The liquified metal is vibrated in the container. The vibrating liquified metal is forced through the orifices, the vibration causing the liquified metal to form uniformly sized metal droplets. A charge is placed on the liquified metal either when it is in the container or after the liquified metal exits the container, the charging thereof causing the droplets to maintain their uniform size. The uniformly sized droplets can be used to coat a substrate with the liquified metal.

Production of charged uniformly sized metal droplets

Growing community of inventors

Sudbury, MA, United States of America

Jung-Hoon Chun