Taiwan Semiconductor Manufacturing Comp. Ltd.

Jung-Chen Yang

Wei Zhang

Chia-Chun Hung

Chian-Liang Lin

Shih-Min Liu

You-Hua Chou

Yen-Shuo Su

Wen-Kung Cheng

Chen-Peng Fan

Ming-Hsien Chen

Yao Hsiang Liang

Chao-Keng Li

Yen-Chang Chao

Yong-Ping Chan

Richard Chen

Jain-Shing Tsai

Wen-Yu Ho

Yong-Sin Chang

Labo Chang

A semiconductor structure includes a transistor formed over a substrate. The transistor includes a transistor gate and at least one source/drain region. The semiconductor structure includes a pre-determined region coupled to the transistor. The semiconductor structure further includes a resist protection oxide (RPO) layer formed over the pre-determined region, wherein the RPO layer has a level of nitrogen of about 0.35 atomic % or less.

Image sensor having an RPO layer containing nitrogen

A method is disclosed for forming at least one image sensor with improved sensitivity along with at least one transistor device. The method comprises forming at least a portion of the transistor device on a substrate, forming the image sensor by doping a predetermined area separated from the transistor device by a minimum predetermined distance, forming an etch stop layer for covering a contact area of the transistor device, removing at least a portion of the etch stop layer in the predetermined area for exposing the image sensor, and covering the image sensor and the transistor device by at least one transparent protection layer.

System and method to improve image sensor sensitivity

A capacitor having an electrically/conductive plate, an electrically conductive segmented electrically conductive plate segments and a second plurality of electrically conductive plate segments, a first capacitor dielectric disposed between the plate and the segment plate, at least one electrically conductive interconnect coupling each of the plate segment of one of the first and second plurality of plate segments to the plate, and a second capacitor dieletric disposed between the plate segments.

Metal-insulator-metal capacitor structure

Growing community of inventors

Chu-Pei, Taiwan

Jung-Chen Yang