Taiwan Semiconductor Manufacturing Comp. Ltd.

Jung-Chang Chen

Chin-Hsiang Lin

Tze-Liang Lee

Jong-I Mou

Ming-Te Chen

Jo Fei Wang

Po-Feng Tsai

Chia-Tong Ho

Li-Chung Wang

Wen-Shan Chang

Da-Hsiang Chou

Cheng-Chia Kuo

Shih-Chang Hsu

Jong-Min Lin

Kuo-Ming Yu

Kuo-Chuan Chen

The present disclosure provides various methods for tool condition monitoring, including systems for implementing such monitoring. An exemplary method includes receiving data associated with a process performed on wafers by an integrated circuit manufacturing process tool; and monitoring a condition of the integrated circuit manufacturing process tool using the data. The monitoring includes evaluating the data based on an abnormality identification criterion, an abnormality filtering criterion, and an abnormality threshold to determine whether the data meets an alarm threshold. The method may further include issuing an alarm when the data meets the alarm threshold.

Qualitative fault detection and classification system for tool condition monitoring and associated methods

A clamp for quickly, effectively and safely removing a cathode collar from an HDP deposition chamber for routine maintenance, cleaning or replacement of the collar. The clamp includes a pair of clamp plates which are capable of pivoting movement on respective ends of a connecting rod. A clamp shoe for gripping a corresponding edge of the annular collar is provided on the bottom end of each clamp plate, and a turnbuckle is fitted with a pair of threaded shafts which engage the upper end portions of the respective clamp plates. By rotating the turnbuckle, the threaded shafts are advanced away from each other against the clamp plates, which pivot on the connecting rod and cause the clamp shoes to tightly engage respective edges of the collar. The clamp is grasped to lift the collar from the chamber and replace the collar in the chamber after cleaning or maintenance.

Collar removing clamp for HDP chamber

Growing community of inventors

Hsinchu, Taiwan

Jung-Chang Chen