Kionix, Inc.

June Shen-Epstein

Scott G Adams

Scott A Miller

Nathan L Stirling

Keith Epstein

Eric P Chojnacki

Nenad Nenadic

Vasile Nistor

In an embodiment of the present invention there is provided a micro-electromechanical (MEMS) accelerometer, including a substrate, a first sensor and a second sensor. The first sensor is configured to measure an acceleration along a first axis parallel to a plane of the substrate. The second sensor is configured to measure an acceleration along an axis perpendicular to the plane of the substrate. The second sensor comprises a first beam, a second beam and a single support structure. The single support structure supports the first and second beams relative to the substrate, wherein the first and second beams circumscribe the first sensor.

Tri-axis accelerometer

An oscillatory rate sensor is described for sensing rotation about the 'z-axis'. It is tuning-fork in nature with structural linkages and dynamics such that fundamental anti-phase oscillation of two proof masses is accomplished by virtue of the mechanical linkages.

Z-axis angular rate sensor

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Freeville, NY, United States of America

June Shen-Epstein