Samsung Display Co., Ltd.

Korea University Research and Business Foundation

Sogang University Research Foundation

Samsung Electronics Co., Ltd.

Yonsei University

June Huh

Min Hyuck Kang

Tae Woo Kim

Seung-Won Park

Joona Bang

Su Mi Lee

Bong-Jin Moon

Hyun Jung Jung

Myung Im Kim

Xie Lei

Na Na Kang

Sang Hoon Woo

Jin Yeong Lee

In Taek Han

Haeng Deog Koh

Mi-Jeong Kim

Seong-Jun Jeong

Youn Jung Park

A block copolymer is provided. The block copolymer according to an exemplary embodiment includes a first block represented by Chemical Formula 1 and a second block represented by Chemical Formula 2: wherein COM1 and COM2 are independently selected from a polystyrene moiety, polymethylmethacrylate moiety, polyethylene oxide moiety, polyvinylpyridine moiety, polydimethylsiloxane moiety, polyferrocenyldimethylsilane moiety, and polyisoprene moiety, R1 is hydrogen or an alkyl group with 1 to 10 carbon atoms, Ph is a phenyl group, a is 1 to 50, R2 is hydrogen or an alkyl group with 1 to 10 carbon atoms, and b is 1 to 50.

Block copolymer, method of forming the same, and method of forming pattern

A method of patterning a block copolymer layer, the method including: providing a substrate with a guide pattern formed on a surface thereof; forming a block copolymer layer on the substrate with the guide pattern, the block copolymer layer including a block copolymer; and directing self-assembly of the block copolymer on the substrate according to the guide pattern to form n/2 discrete domains, wherein the guide pattern includes a block copolymer patterning area having a 90-degree bending portion, and an outer apex and an inner apex of the 90-degree bending portion are each rounded, the outer apex having a first curvature radius r, and the inner apex having a second curvature radius r, respectively, and the width of the patterning area W, the first curvature radius rand the second curvature radius r, satisfy Inequation 1: 

Method of patterning block copolymer layer and patterned structure

Growing community of inventors

Seoul, South Korea

June Huh