Korea Advanced Institute of Science and Technology

Center for Integrated Smart Sensors Foundation

Jun-Young Park

Yang-Kyu Choi

Byung-Hyun Lee

Dae-Chul Ahn

Chang-Hoon Jeon

Hagyoul Bae

The present invention provides a thermal hardware-based data security device that is capable of physically, hardware-wise, and permanently erasing data stored in a memory and of enabling a storage device to be reused, and a method thereof. The thermal hardware-based data security device includes: a memory chip capable of storing data; a heater module which supplies heat to permanently erase the data stored in a memory cell within the memory chip; and a switch module which short-circuits the heater module between a power supply unit and a ground when switched on, and thus, controls the heater module to be operated.

Thermal hardware-based data security device that permanently erases data by using local heat generation phenomenon and method thereof

Disclosed are a vertically-integrated 3-dimensional flash memory for improving a reliability of cells and a fabrication method thereof. The fabrication method of the vertically-integrated 3-dimensional flash memory includes sequentially stacking a first insulating layer and a second insulating layer on a substrate to form a plurality of insulating layers, etching a portion of the insulating layers to expose an area of the substrate, forming a channel layer on a side surface of the etched insulating layers and on the substrate, forming a first macaroni layer on the channel layer, and forming a second macaroni layer on the first macaroni layer such that a side surface and a lower surface of the second macaroni layer are surrounded by the first macaroni layer.

Vertically-integrated 3-dimensional flash memory for high reliable flash memory and fabrication method thereof

Provided is a method for increasing a driving current of a junctionless transistor that includes: a substrate; a source region and a drain region which are formed on the substrate and are doped with the same type of dopant; a nanowire channel region which connects the source region and the drain source and is doped with the same type dopant as that of the source region and the drain region; a gate insulation layer which is formed to surround the nanowire channel region; and a gate electrode which is formed on the gate insulation layer and is formed to surround the nanowire channel region. An amount of current flowing through the nanowire channel region is increased by joule heat generated by applying a voltage to the source region and the drain region.

Method for increasing driving current of junctionless transistor

A tunneling field-effect transistor may be provided that includes: a substrate; a source which is formed on the substrate and into which p+ type impurity ion is injected; a drain which is formed on the substrate and into which n+ type impurity ion is injected; a plurality of vertically stacked nanowire channels which are formed on the substrate; a gate insulation layer which is formed on the plurality of nanowire channels; and a gate which is formed on the gate insulation layer. As a result, it is possible to generate a higher driving current without changing the length of the gate and the area of the channel (degree of integration).

Tunneling field-effect transistor with a plurality of nano-wires and fabrication method thereof

A multi-bit capacitorless DRAM according to the embodiment of the present invention may be provided that includes: a substrate; a source and a drain formed on the substrate; a plurality of nanowire channels formed on the substrate; a gate insulation layer formed in the plurality of nanowire channels; and a gate formed on the gate insulation layer. Two or more nanowire channels among the plurality of nanowire channels have different threshold voltages. Each of the nanowire channels includes: a silicon layer; a first epitaxial layer which is formed to surround the silicon layer; and a second epitaxial layer which is formed to surround the first epitaxial layer. As a result, the high integration multi-bit capacitorless DRAM which operates at multi-bits can be implemented and a performance of accumulating excess holes can be improved by using energy band gap.

Growing community of inventors

Daejeon, South Korea

Jun-Young Park