Agiltron Corporation

Jun Yan

Jing Zhao

Luzhong Yin

Guixiong Zhong

Yuanxin Shou

Yi He

Amit Ghosh

A MEMS variable optical attenuator (VOA) chip includes a frame having a planar surface, a micro-electric actuator with a movable optical shutter arranged with respect to the planar surface of the frame, where the VOA is actuated by thermal expansion. The micro-electric actuator comprises semiconductor conductors ('wires') that can be moved, upon applying an electrical current, by thermal expansion. In one embodiment, the MEMS VOA chip is configured in a multiple wire arrangement that restricts the shutter movement in a plane.

Compact thermal actuated variable optical attenuator

An optical switch including a bistable component, a reflective component, the reflective component being operatively connected to the bistable component, a first electrothermal bent beam actuator, a first contacting component operatively connected to the first electrothermal bent beam actuator component, the first electrothermal bent beam actuator component and the first contacting component disposed such as to enable advancing the bistable component the reflective component from a first stable configuration to a second stable configuration, a second electrothermal bent beam actuator component and a second contacting component operatively connected to the second electrothermal bent beam actuator component, the second electrothermal bent beam actuator component and the second contacting component disposed such as to enable advancing the bistable component and the reflective component from the second stable configuration to the first stable configuration.

MEMS bistable optical switch and methods for use thereof

Growing community of inventors

Reading, MA, United States of America

Jun Yan