Seiko Epson Corporation

Epson Toyocom Corporation

Jun Watanabe

Kazuyuki Nakasendo

Kenta Sato

Hisao Motoyama

Takahiro Kameta

Shinji Nishio

Masanobu Fujisaki

The oscillation circuit includes a drive circuit and an amplitude limiting circuit. A vibrator-output signal is input to the drive circuit from one end of the vibrator, and the drive circuit outputs a drive signal obtained by inverting the vibrator-output signal. The amplitude limiting circuit is disposed between an output node of the drive circuit and the other end of the vibrator, and outputs an amplitude-limited drive signal obtained by reducing an amplitude of the drive signal to the other end of the vibrator.

Oscillation circuit and sensor device

An inertial measurement unit includes: a sensor unit having an inertial sensor; and a first holding unit holding the sensor unit. The first holding unit includes: a first substrate; a second substrate; a plurality of spacers coupling the sensor unit and the first substrate; a first elastic member and a second elastic member provided on both sides of the first substrate via opening parts; a first fixing member penetrating, pressing and fixing the first substrate and the first elastic member to the second substrate; and a second fixing member penetrating, pressing and fixing the first substrate and the second elastic member to the second substrate.

Inertial measurement unit

An inertial measurement device includes: an inertial sensor; a battery supplying electric power to the inertial sensor; a first case accommodating the inertial sensor; and a second case accommodating the battery. The battery and the first case are spaced apart from each other. The second case is fixed outside the first case.

Inertial measurement device

A sensor includes a plurality of mounting boards with sensor components mounted on amounting surface, and a support member provided with fixation surfaces adapted to fix the plurality of mounting boards, the sensor components are disposed between the mounting boards and the support member, and the mounting boards are connected to each other with a connection member.

Sensor having a plurality of mounting boards on which sensor components are mounted, an electronic apparatus having the sensor, and a moving object having the sensor

A physical quantity detection device includes: a base portion; a movable portion supported by the base portion via a joint and shifting in accordance with a change of a physical quantity; a physical quantity detection element extending over the base portion and the movable portion; a first support member extending from the base portion and having a first fixing portion; and a second support member extending from the base portion and having a second fixing portion. The distance between the first fixing portion and the second fixing portion is shorter than the distance between the root of the first support member at the junction with the base portion and the root of the second support member at the junction with the base portion.

Physical quantity detection device, physical quantity detector, and electronic apparatus

A method for manufacturing a physical quantity detector is for a physical quantity detector including a flat frame-like base part, a flat plate-like moving part which is arranged inside the base part and has one end thereof connected to the base part via a joint part, and a physical quantity detection element laid on the base part and the moving part. The method includes: integrally forming the base part, the joint part, the moving part, and a connecting part which is provided on a free end side of the moving part and connects the base part and the moving part to each other; laying and fixing the physical quantity detection element on the base part and the moving part; and cutting off the connecting part.

Method for manufacturing physical quantity detector, and physical quantity detector

An acceleration sensor includes an acceleration detector, a first fixed portion and a second fixed portion, and first to fourth beams that connect the first fixed portion and the second fixed portion to the acceleration detector. A support substrate includes a fixed first substrate piece, a movable second substrate piece, and a hinge that connects the first substrate piece and the second substrate piece to each other. The longitudinal direction of the acceleration detector extends along the direction perpendicular to a detection axis thereof, and a central portion of the acceleration detector in the short-side direction overlaps with the hinge in the short-side direction. The length of the second substrate piece along the longitudinal direction of the hinge is greater than the length of the second substrate piece along the short-side direction of the hinge.

Acceleration sensor

A physical quantity detection device includes: a base; a movable portion, provided in the base through a coupling portion, which is displaced in accordance with a change in a physical quantity; a physical quantity detection element which is fixed across the base and the movable portion; and a mass portion which is fixed to the movable portion, wherein the movable portion includes a first fixing portion to which the physical quantity detection element is fixed, a second fixing portion to which the mass portion is fixed, and a notch having a notched shape which is separated from the coupling portion, and reaches from a lateral side of the movable portion to a place intersecting a line that links the first fixing portion to the second fixing portion.

Physical quantity detection device, physical quantity detector, and electronic device

An acceleration detector includes a base portion, a plate-like movable portion connected to the base portion via a joint portion, an acceleration detecting element laid over the base portion and the movable portion, and a supporting portion having a part extending along the movable portion from the base portion, as viewed in a plan view. A mass portion partly overlapping the supporting portion, as viewed in a plan view, is arranged on at least one of two main surfaces of the movable portion. The movable portion is displaceable about the joint portion as a fulcrum in a direction intersecting the main surface according to an acceleration applied in the direction intersecting the main surface. A space is provided between the mass portion and the supporting portion in an area where the mass portion and the supporting portion overlap each other.

Acceleration detector, acceleration detecting device, inclination sensor, inclination sensor device, and electronic device

A pressure sensor includes: a housing; a pressure receiver which seals an opening of the housing and transmits pressure from outside the housing to the inside of the housing; and a pressure sensing element having a pressure sensing portion and a pair of base portions which are respectively coupled to both ends of the pressure sensing portion. In the pressure sensor, a force detecting direction is set to be a detection axis, a line connecting the pair of base portions and a displacement direction of the pressure receiver are arranged in parallel, one of the base portions is coupled to a central region, which is displaced by the pressure, of the pressure receiver, and the other of the base portions is coupled to a marginal region, which is at a fixing side, of the pressure receiver through a connecting member.

Pressure sensor

An acceleration sensing device includes: an outer frame; a first drive arm having both ends supported by sides of the outer frame through respective base parts, the sides opposing each other; a second drive arm extending from one of the base parts of at least one of the sides toward the other side; and a sensing arm that is disposed midway between the first drive arm and the second drive arm and extends form the one base part of the one side toward the other side, the sensing arm having an electrode in order to extract electric charge generated in the sensing arm. In the device, the first drive arm and the second drive arm have excitation electrodes for a flexural vibration and form a tuning fork type resonator, and center positions in thicknesses of sections that are located in the base parts and on an extension line of the first drive arm differ from a center position in a thickness of the first drive arm.

Acceleration sensing device

A pressure sensor includes: a housing having openings at both ends thereof; a pair of pressure-receiving devices configured to seal the openings respectively and transmit a pressure from the outside to the interior of the housing; a force transmission device configured to connect the pair of pressure-receiving devices and transmit a force that one of the pressure-receiving devices receives to the other pressure-receiving device; and a pressure-sensitive element having a pressure-sensitive portion and a pair of base portions to be connected to both ends of the pressure-sensitive portion, wherein a line connecting the pair of base portions and a detection axis, which is a direction of detection of the force, and the direction of displacement of the force transmission device are arranged in parallel; the one of the base portions is a first fixed portion, a pair of connecting devices extending from the other base portion so as to interpose the pressure-sensitive portion are connected respectively to a pair of second fixed portions arranged at positions in symmetry with respect to the first fixed portion, the first fixed portion is fixedly supported by the force transmission device, and the second fixed portions are supported and fixed to portions where a line connecting the first fixed portion and the pair of second fixed portions intersect the housing.

An objective is to provide an acceleration sensor element that has a high detection sensitivity and that realizes an accurate measurement of acceleration; and an acceleration sensor including this acceleration sensor element to realize a smaller size and a thinner thickness. An acceleration sensor element comprises a quartz, has a thickness in a Z axis direction, and is formed in a quartz substrate developed in an orthogonal XY plane. A thin-walled section of a bottom section of a concave section of the quartz substrate has a double-ended vibrating reed in which a pair of vibration arms extend in a Y axis direction. When acceleration in a Z axis direction is applied while this double-ended vibrating reed having bending vibration, the acceleration is detected based on a change in a resonance frequency caused when the double-ended vibrating reed deflects in the Z axis direction.

Acceleration sensor element and acceleration sensor

An acceleration sensor, including: an oscillator unit for outputting an oscillator signal, the oscillator unit including a first piezoelectric vibrating reed having a vibrating arm that performs bending vibration, as well as an oscillator circuit for oscillating the first piezoelectric vibrating reed; a phase shifting unit for shifting and outputting a given phase angle of an output signal of the oscillator unit; a phase shift circuit unit provided with a second piezoelectric vibrating reed having a vibrating arm that performs bending vibration, arranged at an output side of the phase shifting unit; a multiplier for multiplying the output signal of the phase shift circuit unit by the output signal of the oscillator circuit; and a phase shift modification output unit which receives an output from the multiplier and outputs a value corresponding to a change in a phase shift angle of an input-output signal of the phase shift circuit unit; a resonant frequency of the second piezoelectric vibrating reed being equal to a frequency of the output signal of the oscillator unit, in a state where no acceleration is applied.

Vibration acceleration sensor

A stress sensitive element includes a vibrating arm having an electrode, a beam portion integrated with the vibrating arm at both ends of the vibration arm, and a connecting portion interposed between the beam portion and the vibrating arm. The element is placed by providing a fixing portion to one of the connecting portion and the beam portion, and an extending direction of the vibrating arm is orthogonal to a stress direction to be detected.

Growing community of inventors

Matsumoto, Japan

Jun Watanabe