Omron Corporation

Jun Takashima

Hisayasu Morino

Kenichi Matoba

Naoki Fujiwara

Hiroaki Takimasa

Masayuki Hayakawa

Tomonori Kondo

Takahiro Okuda

Masaru Horie

Mariko Marukawa

Yusuke Nagasaki

Hideyuki Murai

Koichi Ekawa

Provided is a confocal sensor having a wider measuring range. A confocal sensorcomprises: a light sourcethat emits light at a plurality of wavelengths; a diffractive lensthat causes a chromatic aberration with respect to the light along an optical axis and focuses the light onto an objectwithout another intervening lens; a pinholethrough which reflected light passes, the reflected light being a portion of the light that was focused onto and reflected from the objectand focused by the diffractive lens; and a measuring unitthat measures the distance from the diffractive lensto the objecton the basis of a wavelength of the reflected light. A distance Lfrom the pinholeto the diffractive lensis variable.

Confocal sensor

An error of a measured distance is reduced. An optical measurement device () includes: a light source (), which emits lights; a sensor head (), which condenses reflected lights reflected by a target (TA); a light reception portion (), which is configured in a manner that each of a plurality of pixels is capable of detecting a light reception amount, and which obtains a light reception amount distribution signal of each pixel for the condensed reflected lights; a measurement portion (), which measures a distance from the optical measurement device () to the target (TA) based on the light reception amount distribution signal; and a correction portion (), which corrects the measured distance that is measured based on a predefined characteristic value in a waveform of the light reception amount distribution signal.

Optical measurement device and optical measurement method

A confocal measurement device includes a light source that outputs white light, an optical coupler, a sensor head that applies light with a chromatic aberration caused therein to a measurement object, and a spectroscope that acquires reflected light which is reflected by the measurement object and measures a spectrum of the reflected light. The optical coupler is a filter type coupler or a spatial optical system type coupler that brings a first transmission waveform when light is transmitted from a first optical fiber cable to a second optical fiber cable and a second transmission waveform when light is transmitted from the second optical fiber cable to a third optical fiber cable close to each other.

Confocal measurement device

To improve light use efficiency and thereby achieve even higher sampling rates. An optical measurement device includes: a light source configured to emit illumination light including a plurality of wavelength components; an optical system configured to introduce an axial chromatic aberration into the illumination light from the light source and to receive reflection light reflecting from a measurement object where at least a portion of the measurement object lies along a line extending from the optical axis of the optical system; a spectrometer for separating the reflection light received at the optical system into wavelength components, and a detector including a plurality of light receiving elements arranged one-dimensionally to correspond to the dispersion direction of the spectrometer.

Optical measurement device

Providing a spectrometric measuring instrument suitable for in-line measurement for example in a semiconductor manufacturing process, an FPD manufacturing process, or the like, by realizing size reduction and imparting resistance to distance fluttering, angle fluttering in a horizontal direction, and angle fluttering in a perpendicular direction. A light interference type spectral element for gradually changing a wavelength of transmitted light by means of a transmitted position is provided immediately before the photoelectric transfer part array device, and based upon a light-receiving side optical system having the function of detecting a change in state of polarization of a reflected light from a sample, and a series of light-receiving amount data obtained from each of photoelectric transfer parts of the photoelectric transfer part array device, polarized light is analyzed. By fitting of a measured waveform to a theoretical waveform, a film thickness or film quality is obtained.

Growing community of inventors

Uji, Japan

Jun Takashima