Kabushiki Kaisha Nihon Micronics

Jun Shirato

Satoshi Narita

An inspection apparatus makes an inspection of electrical characteristics of an object to be inspected using a contactor brought into electrical contact with an electrode of the object to be inspected, the inspection apparatus including: a position adjusting unit including the contactor, a position adjusting section that adjusts a tip position of the contactor, and a load detecting section that detects a value of contact load between the contactor and the electrode; a position deriving section that derives an initial position of the contactor in a specific direction based on a relationship between an amount of contact displacement of the contactor in the specific direction and the value of contact load between the contactor and the electrode; and a movement performing section that moves the tip position of the contactor based on the initial position in the specific direction derived by the position deriving section.

Inspection apparatus having a contactor for inspecting electrical characteristics of an object, a contactor tip position adjusting unit, and a position adjusting method therefor

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Tokyo, Japan

Jun Shirato